Patents by Inventor Michael DÜR

Michael DÜR has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12009248
    Abstract: Disclosed is a pin lifting device which includes a housing extending along an adjustment axis, a housing end at a first end region of the housing and has a housing opening, a drive part arranged at a second end region of the housing, an adjusting device having a part which can move in the housing in the direction of the adjustment axis, a guide section for the adjusting device formed on the inside of the housing between a first stop at the frontal housing end and a second stop remote therefrom, a tight connecting device formed inside the housing between the frontal housing end and the adjusting device, and a connecting channel extending from the first stop to the second stop at the guide section. A contiguous second inner region leads to minimal changes in the volume of the second inner region even during movements of the movable part.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: June 11, 2024
    Assignee: VAT HOLDING AG
    Inventors: Michael Dür, Rico Rohner, Adrian Eschenmoser, Marco Apolloni
  • Publication number: 20240086082
    Abstract: A memory controller is configured to be operatively connected to clients for shared memory access. The memory controller is configured to perform a recovery of a shared memory by determining starting point for the recovery and then replicating shared memory to target file system. The memory controller is configured to determine starting point by: generate journal of file operations, generate a snapshot of the shared memory; restore shared memory as per the snapshot to the target file system; determine last operation before snapshot in journal; and set next operation after last operation as starting point. The memory controller is further configured to replicate shared memory by replaying file operations according to journal starting with starting point. The present disclosure enables to create an initial consistent synchronization point of the shared memory with clients, which in turn ensures reliable data recovery of the shared memory in any adverse event.
    Type: Application
    Filed: November 22, 2023
    Publication date: March 14, 2024
    Inventors: Itamar OFEK, Igor SHAFRAN, Daniel GOODMAN, Eddy DUER, Michael HIRSCH, Assaf NATANZON
  • Patent number: 11784086
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. The pin lifting device includes a coupling, a supporting pin configured to support the substrate, and a drive unit which configure to drive the coupling. The pin lifting device includes a separating means for separating a process atmosphere area from an external atmosphere area. The drive unit is at least partially in the external atmosphere area and the coupling is in the process atmosphere area. The coupling includes a linearly extending recess defining a central receiving axis. The recess has a width substantially orthogonally to the receiving axis. A clamping section delimited axially with respect to the receiving axis has a clamping element, in an unloaded receiving state, defines a clamping width that is smaller than the recess width, and the clamping width is variable as a function of a force acting radially on the clamping element.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: October 10, 2023
    Assignee: VAT HOLDING AG
    Inventors: Daniel Dünser, Clemens Kühne, Michael Dür, Rene Bereuter
  • Publication number: 20230290668
    Abstract: A pin lifting device (1) for lowering a substrate (2) onto a substrate carrier (15) and for lifting the substrate (2) off the substrate carrier (15) in a process chamber, in particular a vacuum process chamber. The pin lifting device (1) includes at least one lifting pin holder (4) and at least one lifting drive (5) for moving the lifting pin holder (4), which has a lifting pin (6) mounted thereon, in a reciprocating manner along a linear lifting motion path (7). The lifting pin holder (4) is mounted on the lifting drive (5) by a compensation bearing (8), and the compensation bearing (8) facilitates a relative movement between the lifting drive (5) and the lifting pin holder (4) in at least one direction (9) orthogonal to the linear lifting motion path (7).
    Type: Application
    Filed: July 16, 2021
    Publication date: September 14, 2023
    Applicant: VAT Holding AG
    Inventor: Michael DÜR
  • Patent number: 11587819
    Abstract: A pin lifting device is disclosed and configured for moving and positioning a substrate to be processed in an atmosphere region provided by a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin adapted to contact and support the substrate, and a drive part having a drive unit adapted to cooperate with the coupling by means of an adjusting member such that the coupling is controllably adjustable from a lowered normal position to an extended support position and back. The pin lifting device also has an insulating component located between the drive part and the coupling part and providing complete galvanic isolation between the drive part and the coupling part.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: February 21, 2023
    Assignee: VAT HOLDING AG
    Inventors: Michael Dür, Rico Rohner, Adrian Eschenmoser, Marco Apolloni
  • Patent number: 11404304
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate in a process atmosphere region. The pin lifting device has a coupling part including a coupling configured to receive a support pin designed to contact and carry the substrate, and a drive unit configured to adjust the coupling linearly along an adjustment axis (A) from a lowered normal position into an extended support position and back. The coupling part has a sliding guide element movable along the adjustment axis (A), where the sliding guide element is coupled to the drive unit and where the sliding guide element has at least one sliding element. The sliding element interacts with a guide surface provided by the coupling part to guide the sliding guide element can be linearly along the adjustment axis (A) and in a sliding manner relative to the guide surface.
    Type: Grant
    Filed: August 25, 2020
    Date of Patent: August 2, 2022
    Assignee: VAT HOLDING AG
    Inventor: Michael Dür
  • Patent number: 11373896
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. Also, a pneumatic drive cylinder is provided having a cylindrical housing enclosing a first internal volume and a first piston assembly, having a first piston and a first piston rod. The first piston assembly can be moved into a fitting position by pressurization of the first internal volume. The device has at least one supporting pin connected to the first piston rod. The drive cylinder has a second piston assembly, which has a second piston and a second piston rod. The second piston assembly is arranged for motion coaxial to the first piston assembly. An end surface of the second piston rod faces the first piston. The first and second piston assemblies are arranged so the first piston and the second piston rod have no contact in the fitting position.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: June 28, 2022
    Assignee: VAT HOLDING AG
    Inventors: Michael Dür, Martin Kienreich
  • Publication number: 20220076987
    Abstract: Disclosed is a pin lifting device which is designed for moving and positioning a substrate to be processed, in particular a wafer, in a process atmosphere region which can be provided by a vacuum process chamber. The pin lifting device includes a coupling designed to receive a support pin adapted to contact and support the substrate, and a drive unit designed and interacting with the coupling such that the coupling is linearly adjustable along an axis of adjustment from a lowered normal position to an extended support position and back. The pin lifting device has at least one sensor unit which is designed and arranged in such a way that force-dependent and/or acceleration-dependent condition information can be generated by means of the sensor unit with reference to at least part of the pin lifting device.
    Type: Application
    Filed: December 13, 2019
    Publication date: March 10, 2022
    Inventors: Adrian ESCHENMOSER, Michael DÜR, Andreas HOFER
  • Publication number: 20220044957
    Abstract: Disclosed is a pin lifting device which includes a housing extending along an adjustment axis, a housing end at a first end region of the housing and has a housing opening, a drive part arranged at a second end region of the housing, an adjusting device having a part which can move in the housing in the direction of the adjustment axis, a guide section for the adjusting device formed on the inside of the housing between a first stop at the frontal housing end and a second stop remote therefrom, a tight connecting device formed inside the housing between the frontal housing end and the adjusting device, and a connecting channel extending from the first stop to the second stop at the guide section. A contiguous second inner region leads to minimal changes in the volume of the second inner region even during movements of the movable part.
    Type: Application
    Filed: September 16, 2019
    Publication date: February 10, 2022
    Inventors: Michael DÜR, Rico ROHNER, Adrian ESCHENMOSER, Marco APOLLONI
  • Publication number: 20220020629
    Abstract: Disclosed is a pin lifting device is designed for moving and positioning a substrate to be processed in a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin designed to contact and support the substrate, and further comprises a drive part having a drive unit adapted to cooperate with the coupling such that the coupling is linearly adjustable along an adjustment axis from a lowered normal position to an extended support position and back The pin lifting device has at least one temperature sensor, where the temperature sensor is designed and arranged such that a measurement signal representing thermal information with respect to at least part of the pin lifting device can be generated by means of the temperature sensor.
    Type: Application
    Filed: December 10, 2019
    Publication date: January 20, 2022
    Inventors: Adrian ESCHENMOSER, Michael DÜR, Andreas HOFER
  • Publication number: 20210134651
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. The pin lifting device includes a coupling, a supporting pin configured to support the substrate, and a drive unit which configure to drive the coupling. The pin lifting device includes a separating means for separating a process atmosphere area from an external atmosphere area. The drive unit is at least partially in the external atmosphere area and the coupling is in the process atmosphere area. The coupling includes a linearly extending recess defining a central receiving axis. The recess has a width substantially orthogonally to the receiving axis. A clamping section delimited axially with respect to the receiving axis has a clamping element, in an unloaded receiving state, defines a clamping width that is smaller than the recess width, and the clamping width is variable as a function of a force acting radially on the clamping element.
    Type: Application
    Filed: March 27, 2018
    Publication date: May 6, 2021
    Applicant: VAT Holding AG
    Inventors: Daniel DÜNSER, Clemens KÜHNE, Michael DÜR, Rene BEREUTER
  • Publication number: 20210066115
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate in a process atmosphere region. The pin lifting device has a coupling part including a coupling configured to receive a support pin designed to contact and carry the substrate, and a drive unit configured to adjust the coupling linearly along an adjustment axis (A) from a lowered normal position into an extended support position and back. The coupling part has a sliding guide element movable along the adjustment axis (A), where the sliding guide element is coupled to the drive unit and where the sliding guide element has at least one sliding element. The sliding element interacts with a guide surface provided by the coupling part to guide the sliding guide element can be linearly along the adjustment axis (A) and in a sliding manner relative to the guide surface.
    Type: Application
    Filed: August 25, 2020
    Publication date: March 4, 2021
    Inventor: Michael DÜR
  • Publication number: 20200075390
    Abstract: A pin lifting device is disclosed and configured for moving and positioning a substrate to be processed in an atmosphere region provided by a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin adapted to contact and support the substrate, and a drive part having a drive unit adapted to cooperate with the coupling by means of an adjusting member such that the coupling is controllably adjustable from a lowered normal position to an extended support position and back. The pin lifting device also has an insulating component located between the drive part and the coupling part and providing complete galvanic isolation between the drive part and the coupling part.
    Type: Application
    Filed: August 28, 2019
    Publication date: March 5, 2020
    Inventors: Michael DÜR, Rico ROHNER, Adrian ESCHENMOSER, Marco APOLLONI
  • Publication number: 20190393073
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. Also, a pneumatic drive cylinder is provided having a cylindrical housing enclosing a first internal volume and a first piston assembly, having a first piston and a first piston rod. The first piston assembly can be moved into a fitting position by pressurization of the first internal volume. The device has at least one supporting pin connected to the first piston rod. The drive cylinder has a second piston assembly, which has a second piston and a second piston rod. The second piston assembly is arranged for motion coaxial to the first piston assembly. An end surface of the second piston rod faces the first piston. The first and second piston assemblies are arranged so the first piston and the second piston rod have no contact in the fitting position.
    Type: Application
    Filed: February 12, 2018
    Publication date: December 26, 2019
    Inventors: Michael DÜR, Martin KIENREICH
  • Patent number: 5769125
    Abstract: The present invention is directed to an inversion-resistant tide gate valve comprising a generally tubular sleeve bounding a longitudinally-extending flow-through passage for fluids, the sleeve having an upstream fluid inlet end region adapted to be affixed to an effluent conduit and a downstream fluid outlet region, the downstream fluid outlet region of the sleeve being integrally formed with a longitudinally-extending trough, where the trough is formed of an integral bottom wall and an integral pair of side walls. A disc is affixed along a first portion of its periphery with a flexible member to the downstream fluid outlet region of the sleeve, and a second portion of the periphery of the disc opposite the first portion rests within the trough on the bottom wall of the trough.
    Type: Grant
    Filed: March 27, 1996
    Date of Patent: June 23, 1998
    Assignee: Red Valve Company, Inc.
    Inventors: Michael Duer, Spiros G. Raftis, A. Thomas Abromaitis
  • Patent number: 5727593
    Abstract: An inversion-resistant check valve or tide gate valve has a sleeve bounding a longitudinally extending, flow-through passage for fluids. The sleeve has an intermediate region and an upstream fluid inlet end region mountable on a discharge end of a conduit which is elongated along a longitudinal first axis of symmetry. The sleeve also has a downstream fluid outlet end region comprised of two or more thin and flexible lips which are opposed to each other and which are pre-formed to define a bill which is curvilinear. The lips are thinner and more flexible than the intermediate region. The curvilinear bill ensures sealing of the thinner, more flexible lips, allows easier opening of the valve, and reduces the likelihood of gapping in the lips. Unwanted backflow through the check valve is thereby prevented.
    Type: Grant
    Filed: June 26, 1996
    Date of Patent: March 17, 1998
    Assignee: Red Valve Company, Inc.
    Inventor: Michael Duer