Patents by Inventor Michael DALMER

Michael DALMER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for measuring the distribution or impulse of a series of droplets
    Patent number: 9960057
    Abstract: A device for measuring the distribution and/or impulse of a series of droplets comprises a piezoelectric sensor positioned relative to a source of droplets such that each of a plurality of droplets contacts the piezoelectric sensor in succession, thereby to generate an electrical signal. Logic circuitry is configured to calculate one or more frequencies from the electrical signal.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: May 1, 2018
    Assignee: LAM RESEARCH AG
    Inventors: Michael Dalmer, Alexander Lippert, Philipp Engesser, Rainer Obweger
  • DEVICE FOR MEASURING THE DISTRIBUTION OR IMPULSE OF A SERIES OF DROPLETS
    Publication number: 20160181129
    Abstract: A device for measuring the distribution and/or impulse of a series of droplets comprises a piezoelectric sensor positioned relative to a source of droplets such that each of a plurality of droplets contacts the piezoelectric sensor in succession, thereby to generate an electrical signal. Logic circuitry is configured to calculate one or more frequencies from the electrical signal.
    Type: Application
    Filed: December 18, 2014
    Publication date: June 23, 2016
    Inventors: Michael DALMER, Alexander LIPPERT, Philipp ENGESSER, Rainer OBWEGER
  • Method and apparatus for liquid treatment of wafer shaped articles
    Patent number: 9355836
    Abstract: In an apparatus and method for treating a wafer-shaped article, a spin chuck is provided for holding and rotating a wafer-shaped article. A first liquid dispenser communicates with a supply of an organic liquid and is positioned so as to dispense the organic liquid onto a surface of a wafer-shaped article. A degasifying unit is positioned upstream of the first liquid dispenser and downstream of the supply. The degasifying unit is configured to reduce a dissolved gas content of the organic liquid to less than 20% of a saturation concentration at a pressure of 1 bar.
    Type: Grant
    Filed: December 31, 2013
    Date of Patent: May 31, 2016
    Assignee: LAM RESEARCH AG
    Inventors: Dieter Frank, Michael Dalmer
  • METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
    Publication number: 20150187561
    Abstract: In an apparatus and method for treating a wafer-shaped article, a spin chuck is provided for holding and rotating a wafer-shaped article. A first liquid dispenser communicates with a supply of an organic liquid and is positioned so as to dispense the organic liquid onto a surface of a wafer-shaped article. A degasifying unit is positioned upstream of the first liquid dispenser and downstream of the supply. The degasifying unit is configured to reduce a dissolved gas content of the organic liquid to less than 20% of a saturation concentration at a pressure of 1 bar.
    Type: Application
    Filed: December 31, 2013
    Publication date: July 2, 2015
    Applicant: LAM RESEARCH AG
    Inventors: Dieter FRANK, Michael DALMER