Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.

Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.

Abstract: A tractor cab roof with integral HVAC air ducts includes an upper roof member and a lower roof member. The upper roof member includes a top panel, downwardly depending side edges, and a downwardly depending rear edge. The lower roof member includes a central panel, left and right side panels below the central panel, a rear panel below the central panel, sloping side walls, and a sloping rear wall. Conditioned air ducts are between the upper roof member and the left and right side panels, with conditioned air outlet apertures in the sloping side walls. An evaporator/heater core is mounted on the rear panel, with an air mixing chamber to the rear and a conditioned air discharge cavity in front. Recirculating air intake apertures are provided where the sloping rear wall joins the rear panel. A pair of blowers move conditioned air from the conditioned air chamber into the conditioned air ducts. The flow of conditioned air crosses over the recirculating air in a figure eight pattern.