Patents by Inventor Michael David Steiman

Michael David Steiman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for accurate endpoint detection in supported polishing pads
    Patent number: 6641470
    Abstract: An optical window structure is disclosed. The optical window structure includes a support layer that has a reinforcement layer and a cushioning layer. In addition, the optical windows structure has a polishing pad which is attached to a top surface of the support layer. Furthermore, the optical window structure has an optical window opening and a shaped optical window. The shaped optical window at least partially protrudes into the optical window opening in the support layer and the polishing pad during operation.
    Type: Grant
    Filed: March 30, 2001
    Date of Patent: November 4, 2003
    Assignee: Lam Research Corporation
    Inventors: Eugene Y. Zhao, Kang Jia, Michael David Steiman, Herbert Elliot Litvak, Christian David Frederickson