Patents by Inventor Michael Du'Lyea

Michael Du'Lyea has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas discharge laser long life electrodes
    Patent number: 6466602
    Abstract: A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
    Type: Grant
    Filed: June 9, 2000
    Date of Patent: October 15, 2002
    Assignee: Cymer, Inc.
    Inventors: Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko, Jean-Marc Hueber, Richard G. Morton, Eckehard D. Onkels, Robert A. Shannon, Ross H. Winnick