Patents by Inventor Michael Duhamel

Michael Duhamel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transport apparatus with active edge gripper
    Patent number: 10204811
    Abstract: In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: February 12, 2019
    Assignee: Brooks Automation, Inc.
    Inventors: Michael Duhamel, Richard J. Pickreign
  • SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
    Publication number: 20140119856
    Abstract: In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.
    Type: Application
    Filed: January 7, 2014
    Publication date: May 1, 2014
    Applicant: Brooks Automation, Inc.
    Inventors: Michael Duhamel, Richard J. Pickreign
  • Substrate transport apparatus with active edge gripper
    Patent number: 8628288
    Abstract: In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: January 14, 2014
    Assignee: Brooks Automation, Inc.
    Inventors: Michael Duhamel, Richard J. Pickreign
  • SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
    Publication number: 20120189406
    Abstract: In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.
    Type: Application
    Filed: March 30, 2012
    Publication date: July 26, 2012
    Applicant: BROOKS AUTOMATION, INC.
    Inventors: Michael Duhamel, Richard J. Pickreign
  • Substrate transport apparatus with active edge gripper
    Patent number: 8167522
    Abstract: A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide cables to the end effector for power or communication. In one aspect, the gripper is actuated when a motion sensor senses motion of the end effector. In another aspect, communication signals are wirelessly transferred to the end effector to control the active gripper. In another aspect, power is wirelessly transferred to the end effector to power actuation of the gripper.
    Type: Grant
    Filed: March 30, 2005
    Date of Patent: May 1, 2012
    Assignee: Brooks Automation, Inc.
    Inventors: Michael Duhamel, Richard J. Pickreign
  • Substrate transport apparatus with active edge gripper
    Publication number: 20060222480
    Abstract: A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide cables to the end effector for power or communication. In one aspect, the gripper is actuated when a motion sensor senses motion of the end effector. In another aspect, communication signals are wirelessly transferred to the end effector to control the active gripper. In another aspect, power is wirelessly transferred to the end effector to power actuation of the gripper.
    Type: Application
    Filed: March 30, 2005
    Publication date: October 5, 2006
    Inventors: Michael Duhamel, Richard Pickreign