Patents by Inventor Michael E. Romero

Michael E. Romero has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photocathode designs and methods of generating an electron beam using a photocathode
    Patent number: 10804069
    Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: October 13, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Michael E. Romero, Frances Hill, Rudy F. Garcia
  • PHOTOCATHODE EMITTER SYSTEM THAT GENERATES MULTIPLE ELECTRON BEAMS
    Publication number: 20200279713
    Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.
    Type: Application
    Filed: August 21, 2018
    Publication date: September 3, 2020
    Inventors: Gildardo R. Delgado, Katerina Ioakeimidi, Rudy Garcia, Zefram Marks, Gary V. Lopez Lopez, Frances A. Hill, Michael E. Romero
  • Electron beam generation and measurement
    Patent number: 10748737
    Abstract: A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
    Type: Grant
    Filed: October 2, 2018
    Date of Patent: August 18, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Frances Hill, Michael E. Romero, Rudy F. Garcia
  • Photocathode emitter system that generates multiple electron beams
    Patent number: 10741354
    Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: August 11, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Gildardo R. Delgado, Katerina Ioakeimidi, Rudy Garcia, Zefram Marks, Gary V. Lopez Lopez, Frances A. Hill, Michael E. Romero
  • Metal protective layer for electron emitters with a diffusion barrier
    Patent number: 10714294
    Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: July 14, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Frances Hill, Gildardo R. Delgado, Rudy F. Garcia, Gary V. Lopez Lopez, Michael E. Romero, Katerina Ioakeimidi, Zefram Marks
  • PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USING A PHOTOCATHODE
    Publication number: 20200111637
    Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
    Type: Application
    Filed: December 5, 2019
    Publication date: April 9, 2020
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Michael E. Romero, Frances Hill, Rudy F. Garcia
  • Silicon electron emitter designs
    Patent number: 10607806
    Abstract: Electron source designs are disclosed. The emitter structure, which may be silicon, has a layer on it. The layer may be graphene or a photoemissive material, such as an alkali halide. An additional layer between the emitter structure and the layer or a protective layer on the layer can be included. Methods of operation and methods of manufacturing also are disclosed.
    Type: Grant
    Filed: October 5, 2018
    Date of Patent: March 31, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Frances Hill, Gildardo R. Delgado, Rudy F. Garcia, Michael E. Romero, Katerina Ioakeimidi
  • Photocathode designs and methods of generating an electron beam using a photocathode
    Patent number: 10535493
    Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
    Type: Grant
    Filed: October 3, 2018
    Date of Patent: January 14, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Michael E. Romero, Frances Hill, Rudy F. Garcia
  • METAL PROTECTIVE LAYER FOR ELECTRON EMITTERS WITH A DIFFUSION BARRIER
    Publication number: 20190362927
    Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.
    Type: Application
    Filed: May 22, 2019
    Publication date: November 28, 2019
    Inventors: Frances Hill, Gildardo R. Delgado, Rudy F. Garcia, Gary V. Lopez Lopez, Michael E. Romero, Katerina Ioakeimidi, Zefram Marks
  • Ruthenium encapsulated photocathode electron emitter
    Patent number: 10395884
    Abstract: A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
    Type: Grant
    Filed: October 3, 2018
    Date of Patent: August 27, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Gildardo R. Delgado, Rudy F. Garcia, Katerina Ioakeimidi, Frances Hill, Michael E. Romero
  • RUTHENIUM ENCAPSULATED PHOTOCATHODE ELECTRON EMITTER
    Publication number: 20190108966
    Abstract: A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
    Type: Application
    Filed: October 3, 2018
    Publication date: April 11, 2019
    Inventors: Gildardo R. Delgado, Rudy F. Garcia, Katerina Ioakeimidi, Frances Hill, Michael E. Romero
  • SILICON ELECTRON EMITTER DESIGNS
    Publication number: 20190108963
    Abstract: Electron source designs are disclosed. The emitter structure, which may be silicon, has a layer on it. The layer may be graphene or a photoemissive material, such as an alkali halide. An additional layer between the emitter structure and the layer or a protective layer on the layer can be included. Methods of operation and methods of manufacturing also are disclosed.
    Type: Application
    Filed: October 5, 2018
    Publication date: April 11, 2019
    Inventors: Frances Hill, Gildardo R. Delgado, Rudy F. Garcia, Michael E. Romero, Katerina Ioakeimidi
  • PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USING A PHOTOCATHODE
    Publication number: 20190108964
    Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
    Type: Application
    Filed: October 3, 2018
    Publication date: April 11, 2019
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Michael E. Romero, Frances Hill, Rudy F. Garcia
  • ELECTRON BEAM GENERATION AND MEASUREMENT
    Publication number: 20190108967
    Abstract: A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
    Type: Application
    Filed: October 2, 2018
    Publication date: April 11, 2019
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Frances Hill, Michael E. Romero, Rudy F. Garcia