Patents by Inventor Michael Edward Haslam

Michael Edward Haslam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for reducing reflectivity of a metal layer
    Patent number: 5888908
    Abstract: A method is provided for reducing the reflectivity of a metal layer prior to photolithography. A thin buffer layer, such as oxide, can be deposited over the metal layer. A short plasma etch is performed in order to roughen, but not completely remove, the thin oxide layer. This roughened layer significantly reduces the reflectivity of the underlying metal layer. As an alternative, the brief plasma etch can be applied directly to the metal layer, which results in a significant roughening of its upper surface. This also reduces the reflectivity of the metal layer.
    Type: Grant
    Filed: April 28, 1995
    Date of Patent: March 30, 1999
    Assignee: STMicroelectronics, Inc.
    Inventors: Gregory Joseph Stagaman, Michael Edward Haslam