Patents by Inventor Michael Eugene Littau

Michael Eugene Littau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DETERMINATION OF CENTER OF FOCUS BY DIFFRACTION SIGNATURE ANALYSIS
    Publication number: 20020041373
    Abstract: The present invention provides methods for determination of parameters in lithographic devices and applications by diffraction signature difference analysis, including determination of center of focus in lithography devices and applications, such as for photoresist lithographic wafer processing.
    Type: Application
    Filed: September 4, 2001
    Publication date: April 11, 2002
    Inventors: Michael Eugene Littau, Christopher J. Raymond