Patents by Inventor Michael F. Meehan

Michael F. Meehan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8446562
    Abstract: A positioning system adjusts a position of an optical element within an optical device, such as a variable-zoom lens system. A frame supports the optical element, and an elongated surface of each of one or more elongated support structures supports the frame. The frame also supports one or more piezoelectric actuators that, respectively, engage one of the elongated support structures. A controller supplies a control signal to activate each of the one or more actuator modules. Upon activation, a piezoelectric element of each of the activated actuator modules applies a combination of a first force and a second force to an elongated surface of the respective elongated support structures to position the frame along the elongated surface. The combination of forces applied by the piezoelectric element advances the piezoelectric actuator module along the elongated support structure.
    Type: Grant
    Filed: July 24, 2009
    Date of Patent: May 21, 2013
    Assignee: ASML Holding N.V.
    Inventors: Michael F. Meehan, Fred Joseph Scipione
  • Publication number: 20100026976
    Abstract: A positioning system adjusts a position of an optical element within an optical device, such as a variable-zoom lens system. A frame supports the optical element, and an elongated surface of each of one or more elongated support structures supports the frame. The frame also supports one or more piezoelectric actuators that, respectively, engage one of the elongated support structures. A controller supplies a control signal to activate each of the one or more actuator modules. Upon activation, a piezoelectric element of each of the activated actuator modules applies a combination of a first force and a second force to an elongated surface of the respective elongated support structures to position the frame along the elongated surface. The combination of forces applied by the piezoelectric element advances the piezoelectric actuator module along the elongated support structure.
    Type: Application
    Filed: July 24, 2009
    Publication date: February 4, 2010
    Applicant: ASML Holding N.V.
    Inventors: Michael F. Meehan, Fred Joseph Scipione
  • Patent number: 6760167
    Abstract: An apparatus, system, and method for precision positioning and alignment of a lens in an optical system. The apparatus includes a support, a lever having a pivot point, and a first actuator and a second actuator coupled to the lever and to the support. The first actuator and the second actuator are used to position the lever and thereby position the lens. The first actuator is used to make finer position adjustments of the lever than are made by the second actuator. In one embodiment, the first actuator and the second actuator are pneumatic bellows. In another embodiment, the first actuator and the second actuator are electromechanical devices. A spring can be used to apply a biasing force to the lever.
    Type: Grant
    Filed: April 1, 2003
    Date of Patent: July 6, 2004
    Assignee: ASML Holding N.V.
    Inventors: Michael F. Meehan, David G. Taub, Daniel N. Galburt
  • Publication number: 20030202260
    Abstract: An apparatus, system, and method for precision positioning and alignment of a lens in an optical system. The apparatus includes a support, a lever having a pivot point, and a first actuator and a second actuator coupled to the lever and to the support. The first actuator and the second actuator are used to position the lever and thereby position the lens. The first actuator is used to make finer position adjustments of the lever than are made by the second actuator. In one embodiment, the first actuator and the second actuator are pneumatic bellows. In another embodiment, the first actuator and the second actuator are electromechanical devices. A spring can be used to apply a biasing force to the lever.
    Type: Application
    Filed: April 1, 2003
    Publication date: October 30, 2003
    Inventors: Michael F. Meehan, David G. Taub, Daniel N. Galburt
  • Patent number: 6556364
    Abstract: An apparatus, system, and method for precision positioning and alignment of a lens in an optical system, wherein a first support for coupling to the peripheral edge of the lens is connected to a concentric second support using a plurality of positioning devices. At least one positioning device is configured to move the first support in an axial direction relative to the second support. Each positioning device comprises a lever, an actuator, and a flexure. The lever has a pivot point and is mounted on the second support. The actuator is connected to the lever and used to operate the lever about its pivot point. The flexure has a first end connected to the lever between the actuator and the pivot point. A second end of the flexure is connected to the first support. A second positioning device is used to move the first support relative to the second support in a direction substantially perpendicular to the axial direction.
    Type: Grant
    Filed: April 25, 2001
    Date of Patent: April 29, 2003
    Inventors: Michael F. Meehan, David G. Taub, Daniel N. Galburt
  • Publication number: 20020089734
    Abstract: Active compensation of aberrations in an optical system involves attaching first and second force bars to a mirror. The first force bar is bifurcated to form an opening near its longitudinal midpoint. This opening defines first and second opposed surfaces. A second force bar is substantially perpendicular to the first force bar and extends through the opening of the first force bar so that a medial portion of the second force bar is disposed in the opening of the first force bar. The second force bar is connected to the first surface by at least one actuator. Longitudinal movement of the actuator causes a displacement of the mirror. A support structure is used to support the weight of the force bars and actuator. The force bars are connected to the support structure by a plurality of flexures. A control module receives information from a sensing module and controls the actuator. Other embodiments use more than two force bars and are capable of more fully compensating for any aberrations in the optical system.
    Type: Application
    Filed: March 7, 2002
    Publication date: July 11, 2002
    Inventors: Michael F. Meehan, David G. Taub, Jorge S. Ivaldi
  • Patent number: 6411426
    Abstract: Active compensation of aberrations in an optical system involves attaching first and second force bars to a mirror. The first force bar is bifurcated to form an opening near its longitudinal midpoint. This opening defines first and second opposed surfaces. A second force bar is substantially perpendicular to the first force bar and extends through the opening of the first force bar so that a medial portion of the second force bar is disposed in the opening of the first force bar. The second force bar is connected to the first surface by at least one actuator. Longitudinal movement of the actuator causes a displacement of the mirror. A support structure is used to support the weight of the force bars and actuator. The force bars are connected to the support structure by a plurality of flexures. A control module receives information from a sensing module and controls the actuator. Other embodiments use more than two force bars and are capable of more fully compensating for any aberrations in the optical system.
    Type: Grant
    Filed: November 1, 2000
    Date of Patent: June 25, 2002
    Assignee: ASML, US, Inc.
    Inventors: Michael F. Meehan, David G. Taub, Jorge S. Ivaldi
  • Publication number: 20010033437
    Abstract: An apparatus, system, and method for precision positioning and alignment of a lens in an optical system, wherein a first support for coupling to the peripheral edge of the lens is connected to a concentric second support using a plurality of positioning devices. At least one positioning device is configured to move the first support in an axial direction relative to the second support. Each positioning device comprises a lever, an actuator, and a flexure. The lever has a pivot point and is mounted on the second support. The actuator is connected to the lever and used to operate the lever about its pivot point. The flexure has a first end connected to the lever between the actuator and the pivot point. A second end of the flexure is connected to the first support. A second positioning device is used to move the first support relative to the second support in a direction substantially perpendicular to the axial direction.
    Type: Application
    Filed: April 25, 2001
    Publication date: October 25, 2001
    Applicant: Silicon Valley Group, Inc.
    Inventors: Michael F. Meehan, David G. Taub, Daniel N. Galburt