Patents by Inventor Michael Faibisch

Michael Faibisch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for multi-dimensional optical inspection
    Patent number: 6654115
    Abstract: An optical inspection system has a topology sensing assembly. A height detector detects whether a region of a circuit has a height different from a height of the surface, and provides height data. A topology representation of the circuit, based on the height data, forms the basis for a reduced representation of the topology, and subsequent defect analysis.
    Type: Grant
    Filed: December 31, 2001
    Date of Patent: November 25, 2003
    Assignee: Orbotech Ltd.
    Inventors: Dan Zemer, Michael Faibisch
  • System and method for multi-dimensional optical inspection
    Publication number: 20020093650
    Abstract: An optical inspection system has a topology sensing assembly. A height detector detects whether a region of a circuit has a height different from a height of the surface, and provides height data. A topology representation of the circuit, based on the height data, forms the basis for a reduced representation of the topology, and subsequent defect analysis.
    Type: Application
    Filed: December 31, 2001
    Publication date: July 18, 2002
    Applicant: Orbotech Ltd.
    Inventors: Dan Zemer, Michael Faibisch