Patents by Inventor Michael Fehrenbach
Michael Fehrenbach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7134337Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device.Type: GrantFiled: January 9, 2006Date of Patent: November 14, 2006Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20060107738Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device.Type: ApplicationFiled: January 9, 2006Publication date: May 25, 2006Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20050039530Abstract: A micromechanical sensor is described having a substrate with a structured layer on it, a seismic mass that is movable relative to the structured layer under the effect of a spring force, at least one measuring capacitor electrode array for registering a displacement of the seismic mass in a direction of measurement, and at least one drive capacitor electrode array for deflecting the seismic mass in a self-test direction, the direction of measurement being oriented perpendicular to the self-test direction. A corresponding optimization method is also described.Type: ApplicationFiled: September 4, 2002Publication date: February 24, 2005Inventors: Ralf Schellin, Michael Fehrenbach, Michael Klink
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Patent number: 6831576Abstract: A method for improving the resolution of an A/D converter and/or a converter system having an S/H device and an A/D converter is described. In order to improve the resolution of the A/D converter, an auxiliary signal is superposed on an analog signal, and the superposed signal is sampled and converted into digital output values using the A/D converter. Based on the digital output values, it is possible to determine an output value having higher resolution, e.g., by averaging.Type: GrantFiled: November 13, 2003Date of Patent: December 14, 2004Assignee: Robert Bosch GmbHInventors: Albert Geiger, Reinhard Rieger, Michael Fehrenbach, Juergen Landsgesell
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Patent number: 6776041Abstract: A micromechanical yaw rate sensor having: a substrate having an anchoring device provided on the substrate; and an annular flywheel that is connected, via a flexural spring system, with the anchoring device in such a way that the area of connection with the anchoring device is located essentially in the center of the ring, so that the annular flywheel is able to be displaced, elastically from its rest position, about an axis of rotation situated perpendicular to the substrate surface, and about at least one axis of rotation situated parallel to the substrate surface. The anchoring device has two bases that are situated opposite one another and are connected fixedly with the substrate, connected with one another via a bridge. A V-shaped flexural spring of the flexural spring system is attached to each of the opposite sides of the bridge in such a way that the apex is situated on the bridge and the limbs are spread towards the flywheel with an opening angle.Type: GrantFiled: August 15, 2002Date of Patent: August 17, 2004Assignee: Robert Bosch GmbHInventors: Joerg Hauer, Michael Fehrenbach, Karsten Funk
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Publication number: 20040154398Abstract: The present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element (2a) and a second Coriolis mass element (2b) which are situated over a surface of a substrate (100); having an activating device by which the first Coriolis mass element (2a) and the second Coriolis mass element (2b) are able to have vibrations activated along a first axis (x); and having a detection device by which deflections of the first Coriolis mass elements (2a) and of the second Coriolis element (2b) are able to be detected along a second axis (y), which is perpendicular to the first axis (x), on the basis of a correspondingly acting Coriolis force; the first axis (x) and second axis (y) running parallel to the surface of the substrate (100);Type: ApplicationFiled: April 2, 2004Publication date: August 12, 2004Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20040135713Abstract: A method for improving the resolution of an A/D converter and/or a converter system having an S/H device and an A/D converter is described. In order to improve the resolution of the A/D converter, an auxiliary signal is superposed on an analog signal, and the superposed signal is sampled and converted into digital output values using the A/D converter. Based on the digital output values, it is possible to determine an output value having higher resolution, e.g., by averaging.Type: ApplicationFiled: November 13, 2003Publication date: July 15, 2004Inventors: Albert Geiger, Reinhard Rieger, Michael Fehrenbach, Juergen Landsgesell
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Patent number: 6752017Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.Type: GrantFiled: March 19, 2003Date of Patent: June 22, 2004Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Patent number: 6705164Abstract: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.Type: GrantFiled: March 19, 2003Date of Patent: March 16, 2004Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Patent number: 6691571Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.Type: GrantFiled: May 29, 2003Date of Patent: February 17, 2004Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20030183007Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.Type: ApplicationFiled: May 29, 2003Publication date: October 2, 2003Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20030164040Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.Type: ApplicationFiled: March 19, 2003Publication date: September 4, 2003Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20030154788Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements (100, 200) take place in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.Type: ApplicationFiled: March 19, 2003Publication date: August 21, 2003Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfam Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Patent number: 6360605Abstract: A micromechanical device, in particular an acceleration sensor, includes a seismic mass which is resiliently supported on a substrate via a first flexural spring device and which can be deflected in at least one direction by an acceleration, the deflection being able to be limited by a stop device. The stop device has at least one limit stop that is resiliently supported on the substrate via a second flexural spring device, the second flexural spring device having a greater flexural strength than the first flexural spring device.Type: GrantFiled: June 30, 2000Date of Patent: March 26, 2002Assignee: Robert Bosch GmbHInventors: Stefan Pinter, Martin Schoefthaler, Matthias Illing, Ralf Schellin, Helmut Baumann, Michael Fehrenbach, Dietrich Schubert, Georg Bischopink
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Patent number: 6318177Abstract: A method for producing a micromechanical component (e.g., a capacitive acceleration sensor) having one or several electrical or mechanical function variables dependent on at least one geometric design parameter. The micromechanical component is produced by an etching process via which a structure with bars and trenches is formed. The structure is formed by drafting a design for the micromechanical component in such a way that the geometric design parameter within the local area of the micromechanical component is subject to a predetermined process-related regularity. The design parameter is essentially constant in relation to function blocks in particular, so that in the etching process, the process tolerance of the design parameter within the micromechanical component essentially shows no locus dependency.Type: GrantFiled: April 29, 1999Date of Patent: November 20, 2001Assignee: Robert Bosch GmbHInventors: Nicholas Buchan, Michael Fehrenbach, Dietrich Schubert
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Publication number: 20010017058Abstract: A method for producing a micromechanical component (e.g., a capacitive acceleration sensor) having one or several electrical or mechanical function variables dependent on at least one geometric design parameter. The micromechanical component is produced by an etching process via which a structure with bars and trenches is formed. The structure is formed by drafting a design for the micromechanical component in such a way that the geometric design parameter within the local area of the micromechanical component is subject to a predetermined process-related regularity. The design parameter is essentially constant in relation to function blocks in particular, so that in the etching process, the process tolerance of the design parameter within the micromechanical component essentially shows no locus dependency.Type: ApplicationFiled: April 29, 1999Publication date: August 30, 2001Inventors: NICHOLAS BUCHAN, MICHAEL FEHRENBACH, DIETRICH SCHUBERT
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Patent number: 6272926Abstract: A micromechanical component, in particular an acceleration sensor, includes a substrate, at least one spring element and at least one seismic mass. The spring element is joined at a first end to the substrate and at a second end to the mass, and the rigidity of the spring element is set such that a movement of the mass relative to the substrate can be caused by an acceleration parallel to a surface of the substrate. For the spring element, provision is made for a spring limit stop which limits a deformation of the spring element in response to an acceleration parallel to the surface of the substrate.Type: GrantFiled: April 16, 1999Date of Patent: August 14, 2001Assignee: Robert Bosch GmbHInventors: Michael Fehrenbach, Dietrich Schubert, Heinz-Georg Vossenberg