Abstract: For at least partial fabrication of a mirror for an optical cavity, a surface to be processed of an optical substrate is positioned in an operating plane, which is equal to or parallel to a focal plane of a laser arrangement, and a concave surface profile of the surface is generated by applying a sequence of multiple laser shots to the surface by using a quantum cascade laser of the laser arrangement.

Abstract: The invention relates to a piezoelectric drive, in particular for microvalves. The drive comprises a deformation layer coupled on one side to a piezoelectric layer, which is provided with at least one pair of electrodes, made of two electrodes of opposite polarities, to provide electricity. According to the invention, both electrodes of opposite polarities of the pair of electrodes are arranged together on the side of the piezoelectric layer facing away from the deformation layer. The invention also relates to a microvalve comprising at least one valve channel and a membrane that opens or closes the valve channel, where the membrane simultaneously forms the deformation layer of such a piezoelectric drive.

Abstract: The invention relates to a piezoelectric drive, in particular for microvalves. The drive comprises a deformation layer coupled on one side to a piezoelectric layer, which is provided with at least one pair of electrodes, made of two electrodes of opposite polarities, to provide electricity. According to the invention, both electrodes of opposite polarities of the pair of electrodes are arranged together on the side of the piezoelectric layer facing away from the deformation layer. The invention also relates to a microvalve comprising at least one valve channel and a membrane that opens or closes the valve channel, where the membrane simultaneously forms the deformation layer of such a piezoelectric drive.