Patents by Inventor Michael Francis Pas
Michael Francis Pas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10658211Abstract: At least some embodiments are directed to a system that comprises storage comprising a data structure that cross-references an identifier of a semiconductor wafer, a location of a die in the wafer, an identifier of a lead frame strip, a location of a lead frame in the lead frame strip, and results of a first test on the die. The system also comprises mechanical equipment configured to test packaged die. The system further comprises a processor, coupled to the storage and to the mechanical equipment, configured to perform a second test on a package containing the die and the lead frame using the mechanical equipment and the results of the first test.Type: GrantFiled: August 7, 2018Date of Patent: May 19, 2020Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Joseph Anthony Boduch, Sandia You Ni Chiu, Robert Daniel Orr, Michael Francis Pas
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Publication number: 20180350645Abstract: At least some embodiments are directed to a system that comprises storage comprising a data structure that cross-references an identifier of a semiconductor wafer, a location of a die in the wafer, an identifier of a lead frame strip, a location of a lead frame in the lead frame strip, and results of a first test on the die. The system also comprises mechanical equipment configured to test packaged die. The system further comprises a processor, coupled to the storage and to the mechanical equipment, configured to perform a second test on a package containing the die and the lead frame using the mechanical equipment and the results of the first test.Type: ApplicationFiled: August 7, 2018Publication date: December 6, 2018Inventors: Joseph Anthony Boduch, Sandia You Ni Chiu, Robert Daniel Orr, Michael Francis Pas
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Patent number: 10068786Abstract: At least some embodiments are directed to a system that comprises storage comprising a data structure that cross-references an identifier of a semiconductor wafer, a location of a die in the wafer, an identifier of a lead frame strip, a location of a lead frame in the lead frame strip, and results of a first test on the die. The system also comprises mechanical equipment configured to test packaged die. The system further comprises a processor, coupled to the storage and to the mechanical equipment, configured to perform a second test on a package containing the die and the lead frame using the mechanical equipment and the results of the first test.Type: GrantFiled: April 20, 2017Date of Patent: September 4, 2018Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Joseph Anthony Boduch, Sandia You Ni Chiu, Robert Daniel Orr, Michael Francis Pas
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Patent number: 8629021Abstract: A method for making an NMOS transistor on a semiconductor substrate includes reducing the thickness of the PMD layer to expose the polysilicon gate electrode of the NMOS transistor and the polysilicon gate electrode of the PMOS transistor, and then removing the gate electrode of the NMOS transistor. The method also includes depositing a NMOS-metal layer over the semiconductor substrate, depositing a fill-metal layer over the NMOS-metal layer, and then reducing the thickness of the NMOS metal layer and the fill metal layer to expose the gate electrodes of the NMOS transistor and the PMOS transistor.Type: GrantFiled: November 2, 2007Date of Patent: January 14, 2014Assignee: Texas Instruments IncorporatedInventor: Michael Francis Pas
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Patent number: 8304342Abstract: A chemical mechanical polishing (CMP) stop layer is implemented in a semiconductor fabrication process. The CMP stop layer, among other things, mitigates erosion of sidewall spacers during semiconductor fabrication and adverse effects associated therewith.Type: GrantFiled: October 31, 2006Date of Patent: November 6, 2012Assignee: Texas Instruments IncorporatedInventors: Michael Francis Pas, Manfred Ramin
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Patent number: 8114728Abstract: A method for making an NMOS transistor on a semiconductor substrate includes reducing the thickness of the PMD layer to expose the polysilicon gate electrode of the NMOS transistor and the polysilicon gate electrode of the PMOS transistor, and then removing the gate electrode of the NMOS transistor. The method also includes depositing a NMOS-metal layer over the semiconductor substrate, depositing a fill-metal layer over the NMOS-metal layer, and then reducing the thickness of the NMOS metal layer and the fill metal layer to expose the gate electrodes of the NMOS transistor and the PMOS transistor.Type: GrantFiled: March 25, 2010Date of Patent: February 14, 2012Assignee: Texas Instruments IncorporatedInventor: Michael Francis Pas
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Publication number: 20100178739Abstract: A method for making an NMOS transistor on a semiconductor substrate includes reducing the thickness of the PMD layer to expose the polysilicon gate electrode of the NMOS transistor and the polysilicon gate electrode of the PMOS transistor, and then removing the gate electrode of the NMOS transistor. The method also includes depositing a NMOS-metal layer over the semiconductor substrate, depositing a fill-metal layer over the NMOS-metal layer, and then reducing the thickness of the NMOS metal layer and the fill metal layer to expose the gate electrodes of the NMOS transistor and the PMOS transistor.Type: ApplicationFiled: March 25, 2010Publication date: July 15, 2010Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Michael Francis Pas
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Patent number: 7629212Abstract: A method of fabricating a dual metal gate structures in a semiconductor device, the method comprising forming a gate dielectric layer above a semiconductor body, forming a work function adjusting layer on the dielectric gate layer in the PMOS region, depositing a tungsten germanium gate electrode layer above the work function adjusting material in the PMOS region, depositing a tungsten germanium gate electrode layer above the gate dielectric in the NMOS region annealing the semiconductor device, depositing a metal nitride barrier layer on the tungsten germanium layer, depositing a polysilicon layer over the metal nitride, patterning the polysilicon layer, the metal nitride layer, the tungsten germanium layer, work function adjusting layer and the gate dielectric layer to form a gate structure, and forming a source/drain on opposite sides of the gate structure.Type: GrantFiled: March 19, 2007Date of Patent: December 8, 2009Assignee: Texas Instruments IncorporatedInventors: Manfred Ramin, Mark R. Visokay, Michael Francis Pas
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Patent number: 7531398Abstract: A semiconductor device is fabricated having a metal stress inducing layer that facilitates channel mobility. A gate dielectric layer is formed over a semiconductor substrate. The metal stress inducing layer is formed over the gate dielectric layer. The metal stress inducing layer has a selected conductivity type and is formed and composed to yield a select stress amount and type. A gate layer, such as a polysilicon layer, is formed over the metal stress inducing layer. The gate layer and the metal stress inducing layer are patterned to define gate structures.Type: GrantFiled: October 19, 2006Date of Patent: May 12, 2009Assignee: Texas Instruments IncorporatedInventors: Zhibo Zhang, Cloves Rinn Cleavelin, Michael Francis Pas, Stephanie Watts Butler, Mike Watson Goodwin, Satyavolu Srinivas Papa Rao
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Publication number: 20090117726Abstract: A method for making an NMOS transistor on a semiconductor substrate includes reducing the thickness of the PMD layer to expose the polysilicon gate electrode of the NMOS transistor and the polysilicon gate electrode of the PMOS transistor, and then removing the gate electrode of the NMOS transistor. The method also includes depositing a NMOS-metal layer over the semiconductor substrate, depositing a fill-metal layer over the NMOS-metal layer, and then reducing the thickness of the NMOS metal layer and the fill metal layer to expose the gate electrodes of the NMOS transistor and the PMOS transistor.Type: ApplicationFiled: November 2, 2007Publication date: May 7, 2009Applicant: Texas Instruments IncorporatedInventor: Michael Francis Pas
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Publication number: 20080283941Abstract: An integrated circuit includes one or more transistors on or in a semiconductor substrate. At least one of the transistors includes a gate electrode and source and drain structures. The gate electrode has a fully silicided gate electrode layer with a ratio of Ni:Si ranging from about 2:1 to about 3:1. The source and drain structures are located in openings of the substrate and adjacent to the gate electrode. The source and drain structures are filled with SiGe to produce stress in the transistor channel region.Type: ApplicationFiled: July 15, 2008Publication date: November 20, 2008Inventors: Michael Francis Pas, Shaofeng Yu
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Publication number: 20080274598Abstract: A method of fabricating a dual metal gate structures in a semiconductor device, the method comprising forming a gate dielectric layer above a semiconductor body, forming a work function adjusting layer on the dielectric gate layer in the PMOS region, depositing a tungsten germanium gate electrode layer above the work function adjusting material in the PMOS region, depositing a tungsten germanium gate electrode layer above the gate dielectric in the NMOS region annealing the semiconductor device, depositing a metal nitride barrier layer on the tungsten germanium layer, depositing a polysilicon layer over the metal nitride, patterning the polysilicon layer, the metal nitride layer, the tungsten germanium layer, work function adjusting layer and the gate dielectric layer to form a gate structure, and forming a source/drain on opposite sides of the gate structure.Type: ApplicationFiled: March 19, 2007Publication date: November 6, 2008Inventors: Manfred Ramin, Mark R. Visokay, Michael Francis Pas
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Patent number: 7416949Abstract: Manufacturing a semiconductor device by forming first and second gates including patterning a silicon-containing layer on a substrate. Etched simultaneously the patterned silicon-containing layer of the first gate, and first substrate portions adjacent to the first gate to form a first gate electrode and source and drain openings. Forming SiGe simultaneously in first gate electrode source and drain openings. Second gate and second substrate portions are masked. SiGe is removed from an upper surface of the first gate to form a second opening therein. A metal deposited on the first and second gates forms a metal layer thereon. Annealing first and second gates to form FUSI first and second gate electrodes. A metal amount at an interface of the FUSI gate electrode layer and an underlying gate dielectric layer is greater than at a second interface of the second FUSI gate electrode layer and an underlying second gate dielectric layer.Type: GrantFiled: February 14, 2007Date of Patent: August 26, 2008Assignee: Texas Instruments IncorporatedInventors: Michael Francis Pas, Shaofeng Yu
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Publication number: 20080191289Abstract: Manufacturing a semiconductor device by forming first and second gates including patterning a silicon-containing layer on a substrate. Etched simultaneously the patterned silicon-containing layer of the first gate, and first substrate portions adjacent to the first gate to form a first gate electrode and source and drain openings. Forming SiGe simultaneously in first gate electrode source and drain openings. Second gate and second substrate portions are masked. SiGe is removed from an upper surface of the first gate to form a second opening therein. A metal deposited on the first and second gates forms a metal layer thereon. Annealing first and second gates to form FUSI first and second gate electrodes. A metal amount at an interface of the FUSI gate electrode layer and an underlying gate dielectric layer is greater than at a second interface of the second FUSI gate electrode layer and an underlying second gate dielectric layer.Type: ApplicationFiled: February 14, 2007Publication date: August 14, 2008Applicant: Texas Instruments IncorporatedInventors: Michael Francis Pas, Shaofeng Yu
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Publication number: 20080102634Abstract: A chemical mechanical polishing (CMP) stop layer is implemented in a semiconductor fabrication process. The CMP stop layer, among other things, mitigates erosion of sidewall spacers during semiconductor fabrication and adverse effects associated therewith.Type: ApplicationFiled: October 31, 2006Publication date: May 1, 2008Inventors: Michael Francis Pas, Manfred Ramin
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Publication number: 20080096338Abstract: A semiconductor device is fabricated having a metal stress inducing layer that facilitates channel mobility. A gate dielectric layer is formed over a semiconductor substrate. The metal stress inducing layer is formed over the gate dielectric layer. The metal stress inducing layer has a selected conductivity type and is formed and composed to yield a select stress amount and type. A gate layer, such as a polysilicon layer, is formed over the metal stress inducing layer. The gate layer and the metal stress inducing layer are patterned to define gate structures.Type: ApplicationFiled: October 19, 2006Publication date: April 24, 2008Inventors: Zhibo Zhang, Cloves Rinn Cleavelin, Michael Francis Pas, Stephanie Watts Butler, Mike Watson Goodwin, Satyavolu Srinivas Papa Rao