Patents by Inventor Michael Frank Dean

Michael Frank Dean has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron microscope
    Patent number: 7186976
    Abstract: There is provided a reconfigurable scanning electron microscope (RSEM) (100) comprising: (a) a gun assembly (110) and an associated electron optical column (120) for generating an electron beam (600), for demagnifying the electron beam (600) to generate an electron probe (C3) and for scanning the probe (C3) across a sample (190); (b) an electron detector (550) for detecting emissions from the sample (190) in response to scanned electron probe irradiation thereof and for generating a corresponding detected signal (Sd) indicative of the magnitude of the emissions; and (c) a display (170) for receiving the detected signal (Sd) and scanning signals (x, y) indicative of the position of the probe (C3) relative to the sample (190) for generating the image of the sample (190).
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: March 6, 2007
    Assignee: Carl Zeiss SMT Limited
    Inventors: Michael Frank Dean, Giles Adam Edward Martin
  • Scanning electron microscope
    Publication number: 20040173747
    Abstract: There is provided a reconfigurable scanning electron microscope (RSEM) (100) comprising: (a) a gun assembly (110) and an associated electron optical column (120) for generating an electron beam (600), for demagnifying the electron beam (600) to generate an electron probe (C3) and for scanning the probe (C3) across a sample (190); (b) an electron detector (550) for detecting emissions from the sample (190) in response to scanned electron probe irradiation thereof and for generating a corresponding detected signal (Sd) indicative of the magnitude of the emissions; and (c) a display (170) for receiving the detected signal (Sd) and scanning signals (x, y) indicative of the position of the probe (C3) relative to the sample (190) for generating the image of the sample (190).
    Type: Application
    Filed: April 26, 2004
    Publication date: September 9, 2004
    Inventors: Michael Frank Dean, Giles Adam Edward Martin