Patents by Inventor Michael G. Palin

Michael G. Palin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forming attached features on a semiconductor substrate
    Patent number: 6265757
    Abstract: A method for creating attached features while controlling the depth profile between the features is presented. First the features are formed with a separating barrier between the features. The separating barrier is then etched in a second step with an orientation dependent etchant to attach the two feature. This method can be used to create attached features of relative similar sizes or attached features of disparate sizes.
    Type: Grant
    Filed: November 9, 1999
    Date of Patent: July 24, 2001
    Assignee: Agere Systems Guardian Corp.
    Inventors: Michael F. Brady, Casimir R. Nijander, John W. Osenbach, Michael G. Palin, Aleksandra Yudina