Abstract: A microwave powered discharge device which utilizes a TM.sub.NMO cavity. A conductive body is positioned at a null in a discharge device which utilizes a TM.sub.210 cavity to reduce direct coupling from the microwave coupling means, e.g., slot of the cavity. A plurality of TM.sub.110 cavities are ganged together, and a single discharge tube extends through all of the cavities.

Abstract: A microwave-powered discharge lamp having a microwave cavity, a discharge lamp mounted within the cavity, a reflector for light emitted by the lamp mounted outside the cavity, and a non-conductive reflector mounted within the cavity for outwardly reflecting light emitted from the lamp.

Abstract: Apparatus for treating a fluid by irradiating a thin film of the fluid with high intensity, concentrated light. The irradiation affects chemical physical or biological activity changes in the fluid.

Abstract: An inert ultraviolet light reaction chamber is provided with a flow of liquid on its light transmitting wall surface. The fluid prevents the build up of light blocking deposits, controls the temperature, and filters out undesired portions of the spectrum.

Abstract: A surface discharge excimer light source which employs a one sided cell wherein all electrodes and the dielectric are on one side of the discharge space. The light produced by the device is neither shadowed nor attenuated by an electrode, and the electrode temperatures can be closely controlled. The construction of the device eliminates the need to maintain parallelism of the discharge space and close tolerances.

Abstract: An improved bulb mounting arrangement for an electrodeless lamp to prevent the bulb from rotating during lamp operation. The shape of the bulb mounting projection ends and the shape of the cavity side wall openings are arranged so as to cooperate with each other to preclude substantial rotation of the bulb.

Abstract: An electrodeless lamp system and method for providing light output having a controlled spectral distribution. A lamp having a fill which is not fully vaporized at the lamp operating temperature and which emits in a characteristic region of the spectrum is used. A function generator generates a function signal, and the magnitude of the lamp output in the characteristic region or the ratio of such magnitude and a magnitude in a different characteristic region is compared with the function signal. The difference signal is used to control the amount of cooling gas which is incident on the lamp bulb to control the spectral distribution of the radiation which is emitted by the lamp.

Abstract: A microwave powered electrodeless lamp which employs a hybrid cylindrical cavity which is part mesh and part solid. The cylindrical mesh portion permits the lamp to be used with an external reflector while the cylindrical solid portion enables a plurality of waveguides to be coupled to the cavity for high power operation.

Abstract: An electrodeless lamp which couples to a small bulb and obtains a relatively high light output therefrom. A cavity which comprises a compound resonant structure including vestibule and reflector portions is provided. The combination of vestibule and reflector results in a condition of resonance throughout the cavity, whereby strong fields are coupled to the small bulb and a reflector is provided for directing and enhancing light output.

Abstract: An apparatus for rapidly stripping a photoresist which utilizes an oxidizing fluid such as ozone. A very thin layer of oxidizing fluid of four millimeters or less is flowed over the photoresist. The fluid flows at high velocity over the resist, while the resist is heated. Additionally, the resist may be irradiated with ultraviolet radiation at an irradiance of at least about 800 milliwatts/cm.sup.2.

Abstract: A method and apparatus for detecting system failure in a magnetron power supply circuit. The apparatus is capable of providing an indication as to whether it is the power supply or the magnetron which has failed. A dual half wave doubler power supply circuit is provided and the currents corresponding to the respective dual portions are measured. The currents are compared to detect a failure of one of the dual power supply circuits while a sum of the currents may detect a failure of the magnetron.

Abstract: An electrodeless lamp bulb comprises of a quartz envelope and a fill containing mercury in a ratio of from 0.5-0.9 microliters per milliliter of envelope volume at room temperature. A lamp including such bulb which is powered by microwaves.

Abstract: A lamp including a reflector and a light source for illuminating a target area in which the light rays on the target and have a small average local divergence. The reflector and light source are configured so that the predominant portion of the light rays which strike the target area do not cross the axis of the reflector. The reflector may be segmented and the light source is located so that various points on the target receive radiation which is reflected from a different number of segments with points near the periphery of the target area receiving radiation from a greater number of segments than those near the center of the target.

Abstract: A microwave powered electrodeless light source in which a relatively high power level is coupled to the bulb. This is accomplished by arranging for a plurality of energy modes which are substantially de-coupled from each other to be present in the microwave cavity.

Abstract: A method of cooling the lamp envelope of an electrodeless lamp by directing a stream of cooling gas at the envelope while providing relative rotation between the lamp envelope and the stream of cooling gas. The relative rotation can be achieved by rotating the envelope, or the source of cooling gas, or both.

Abstract: An apparatus and method for maintaining an optical element at a sufficiently high temperature during transmission of radiation by the optical element to prevent radiation degradation of the optical element by an increase in the absorption of at least one wavelength of the radiation. The material of the optical element is such that the absorption of the wavelength(s) concerned temporarily decreases upon annealing the optical element. The optical element may be kept at the temperature required by a wide variety of heating techniques, including gas convection heating, direct contact heating, and radiant heating. The heated optical element may be employed in optical systems for transmitting radiation from a source of radiation to a target to be exposed to this radiation.

Abstract: A microwave powered electrodeless light source which is powered by two magnetrons which are excited successively.

Abstract: A method and apparatus for performing deep UV photolithography which utilizes a microwave generated electrodeless light source for producing deep UV radiation. This results in faster semiconductor exposure times and less system downtime for changing failed bulbs as well as other advantages which are detailed herein.

Abstract: A microwave generated electrodeless light source for producing a bright output comprising a lamp structure including a microwave chamber and a plasma medium-containing lamp envelope having a maximum dimension which is substantially less than a wavelength disposed therein. To provide the desired radiation output the interior of the chamber is coated with a UV-reflective material and the chamber has an opening for allowing UV radiation to exit, which is covered with a metallic mesh. The chamber is arranged to be near-resonant at a single wavelength, and the lamp envelope has a fill including mercury at an operating pressure of 1-2 atmospheres, while a power density of at least 250-300 (watts/cm.sup.3) is coupled to the envelope to result in a relatively high deep UV output at a relatively high brightness.

Abstract: A microwave generated electrodeless lamp using a single magnetron, and an improved lamp envelope therefor. An elongated lamp envelope containing a plasma forming medium is disposed in a microwave chamber comprised of a reflector and mesh. The reflector includes a pair of coupling slots, each of which is disposed equidistant from the ends of the lamp envelope. A waveguide means is provided which has a wall which is comprised of a portion of the reflector which includes the slots, and has means for introducing microwave energy thereto at an area equidistant from the two slots so that the energy couples equally to the slots. When the frequency of the microwave energy and chamber dimensions are arranged so that a symmetrical standing wave exists in the chamber, a balanced system results wherein after a short start-up period, approximately equal light output is obtained from the respective ends of the lamp envelop.