Patents by Inventor Michael G. Whitlock

Michael G. Whitlock has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma stripper with multiple contact point cathode
    Patent number: 4736087
    Abstract: An improved plasma stripping apparatus with external electrodes is provided wherein the cathode has multiple small area contact points adjacent and in close proximity to or uniformly touching the reactor chamber to cause areas of high r.f. field densities that enhance the gas breakdown in the plasma to obtain high rate film removal.
    Type: Grant
    Filed: January 12, 1987
    Date of Patent: April 5, 1988
    Assignee: Olin Corporation
    Inventors: Michael G. Whitlock, Kevin C. Lettire