Abstract: The power output of an RF plasma supply device is controlled by producing at least a first and second RF power signal by means of a respective RF generator, coupling at least two RF power signals into a coupled RF power, and distributing the coupled RF power between a plasma power that is to be supplied to a plasma load and an equalizing power that is to be supplied to an equalizing load. The power output is controlled by adjusting the levels and/or the phase position of the RF power signals in such a manner that, for plasma power in the range between a predefined lower power limit and a predefined nominal power, an insignificant portion of the coupled RF power constitutes the equalizing power and, for plasma power below the predefined lower power limit, a significant portion of the coupled RF power constitutes the equalizing power.

Abstract: An amplifier arrangement for operation at supply voltages of at least 100V and at output powers of at least 1 kW includes a half-bridge formed from two switching elements connected in series, two supply voltage terminals, and an output connection between the switching elements. A bypass capacitor is in parallel with the switching elements, and a current path is through the switching elements and the bypass capacitor, where the current path has a length of 10 cm or less, the half-bridge and the bypass capacitor are arranged on an area of 30 cm2, and a resonant circuit formed by capacitances and inductances in the current path has a resonance frequency of 100 MHz or greater.

Abstract: For exciting a gas laser arrangement with a plurality of HF signals, at least two pulsed HF signals are generated arid at least two electrodes or pairs of electrodes of the gas laser arrangement are supplied with the pulsed HF signals, respectively. At least two of the electrodes or pairs of electrodes are supplied with pulsed HF signals that are phase-shifted with respect to each other.

Abstract: A navigation system for navigating a three-dimensional (3D) scene that includes a model or object with which a user can interact. The system accommodates and helps both novice and advanced users. To do this, the system provides safe navigation features including tool clustering, orientation indicators in the scene, slider indicating scene position, motion warning graphics and other features that help in navigating the scene.

Abstract: A system for controlling a power supplied to a load from a radio frequency amplifier system includes a radio frequency signal generator adapted for generating a radio frequency signal, an amplifier to which the radio frequency signal is supplied and that amplifies the radio frequency signal into a radio frequency power signal, a power coupler connected to the amplifying member for coupling the radio frequency power signals, where the power coupler includes a summing connection adapted for connection to the load and a compensating connection adapted for connection to a dissipative element. A first control value generating member is adapted for receiving a signal proportional to a power output from the power coupler at the summing connection and is adapted for generating a first control signal for controlling the amplifier or a current supply that supplies current to the amplifier.

Abstract: A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network. The output network is arranged on a printed circuit board. The output network can therefore be designed low priced and accurately.

Abstract: A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is connected to a reference potential varying in operation, and is activated by a driver, and wherein the driver has a differential input with two signal inputs and is connected to the reference potential varying in operation.

Abstract: An RF power supply, in particular a plasma supply device, for generating an output power greater than 500 W at an output frequency of at least 3 MHz includes at least one inverter connectable to a DC power supply, which inverter comprises at least one switching element and an output network. An accompanying line connects an electrical component to the inverter by a lead-in of the output network.

Abstract: A plasma supply device includes a full bridge circuit that is connected to a DC power supply and that has two half bridges each with two series connected switching elements. The plasma supply device further includes a primary winding of a power transformer connected to centers of the half bridges between the switching elements. The primary winding includes a tapping connectable to an alternating current center between the potentials of the DC power supply.

Abstract: A 3 dB coupler includes at least one first and one second electric conductor that are spaced apart from each other and are capacitively and inductively coupled to each other in a coupling region. The first conductor represents the primary side of a transformer, and the second conductor represents the secondary side of the transformer. The first and second conductors each have a winding number of n>1.

Abstract: A vacuum plasma generator is used for treating workpieces in a vacuum chamber. The vacuum plasma generator includes a mains connection for connection to a voltage supply network, and at least one mains rectifier. The at least one mains rectifier is connected to at least one first converter that generates at least one intermediate circuit voltage, a first RF signal generator, a second RF signal generator, and at least one 3 dB coupler. The first RF signal generator is connected to at least one intermediate circuit voltage, for generating a first signal of a basic frequency and of a first phase position. The second RF signal generator is connected to at least one intermediate circuit voltage, for generating a second signal of the basic frequency and of a second phase position. The least one 3 dB coupler couples the first and the second signal into an output signal of the generator.

Abstract: An amplifier arrangement for operation at supply voltages of at least 100V and at output powers of at least 1 kW includes a half-bridge formed from two switching elements connected in series, two supply voltage terminals, and an output connection between the switching elements. A bypass capacitor is in parallel with the switching elements, and a current path is through the switching elements and the bypass capacitor, where the current path has a length of 10 cm or less, the half-bridge and the bypass capacitor are arranged on an area of 30 cm2, and a resonant circuit formed by capacitances and inductances in the current path has a resonance frequency of 100 MHz or greater.

Abstract: The invention relates to a device for the optical display of information regarding the actual operating state of a liquid system and/or for setting parameters for a set operating state of the liquid system, comprising a housing (12) arranged in the area of the operation of the liquid system, a display unit (14), accommodated by the housing (12), for optical display of the information in electronic form, and actuating device (16), accommodated by the housing (12), for setting at least one parameter and a, in particular electronic, control unit (18; 44) for processing and/or conditioning of data and/or signals referring to the actual or set operating state of the liquid system, and their use.

Abstract: For exciting a gas laser arrangement with a plurality of HF signals, at least two pulsed HF signals are generated and at least two electrodes or pairs of electrodes of the gas laser arrangement are supplied with the pulsed HF signals, respectively. At least two of the electrodes or pairs of electrodes are supplied with pulsed HF signals that are phase-shifted with respect to each other.

Abstract: A 90° hybrid for splitting or interconnecting radio frequency power includes four gate connections, capacitances and inductances for electric capacitive coupling and magnetic inductive coupling, an arrangement of strip conductors that are disposed approximately parallel to each other and whose ends form gate connections, and whose dimensions and mutual separations are dimensioned to form the electric capacitive and magnetic inductive couplings of the 90° hybrid, and a ferrite ring surrounding the strip conductors to increase the inductive coupling.

Abstract: A method of controlling an input voltage of a high frequency amplifier includes measuring power supplied to a load, determining a first control variable for a series element disposed upstream from the high frequency amplifier based on the measured power and a given set point, and determining a second control variable for a switched DC supply unit from a voltage drop across the series element such that the voltage drop does not exceed a given maximum value and does not fall below a given minimum value.

Abstract: A system for controlling a power supplied to a load from a radio frequency amplifier system includes a radio frequency signal generator adapted for generating a radio frequency signal, an amplifier to which the radio frequency signal is supplied and that amplifies the radio frequency signal into a radio frequency power signal, a power coupler connected to the amplifying member for coupling the radio frequency power signals, where the power coupler includes a summing connection adapted for connection to the load and a compensating connection adapted for connection to a dissipative element. A first control value generating member is adapted for receiving a signal proportional to a power output from the power coupler at the summing connection and is adapted for generating a first control signal for controlling the amplifier or a current supply that supplies current to the amplifier.

Abstract: The invention relates to a device for the optical display of information regarding the actual operating state of a liquid system and/or for setting parameters for a set operating state of the liquid system, comprising a housing (12) arranged in the area of the operation of the liquid system, a display unit (14), accommodated by the housing (12), for optical display of the information in electronic form, and actuating device (16), accommodated by the housing (12), for setting at least one parameter and a, in particular electronic, control unit (18; 44) for processing and/or conditioning of data and/or signals referring to the actual or set operating state of the liquid system, and their use.

Abstract: A method of controlling an input voltage of a high frequency amplifier includes measuring power supplied to a load, determining a first control variable for a series element disposed upstream from the high frequency amplifier based on the measured power and a given set point, and determining a second control variable for a switched DC supply unit from a voltage drop across the series element such that the voltage drop does not exceed a given maximum value and does not fall below a given minimum value.