Patents by Inventor Michael Gosch

Michael Gosch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Versatile semiconductor manufacturing controller with statistically repeatable response times
    Patent number: 8108174
    Abstract: The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data collection, monitoring, control and response to commands from a tool host with statistically repeatable performance and precision. Embodiments described use prioritized real time operating systems to control of semiconductor manufacturing tools and data collection from tool associated with the sensors. Statistically repeatable responsiveness to selected commands and to sensor inputs during selected recipe steps effectively reduces jitter.
    Type: Grant
    Filed: November 16, 2009
    Date of Patent: January 31, 2012
    Assignee: MKS Instruments, Inc.
    Inventors: Leonid Rosenboim, David Michael Gosch
  • VERSATILE SEMICONDUCTOR MANUFACTURING CONTROLLER WITH STATISTICALLY REPEATABLE RESPONSE TIMES
    Publication number: 20100063614
    Abstract: The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data collection, monitoring, control and response to commands from a tool host with statistically repeatable performance and precision. Embodiments described use prioritized real time operating systems to control of semiconductor manufacturing tools and data collection from tool associated with the sensors. Statistically repeatable responsiveness to selected commands and to sensor inputs during selected recipe steps effectively reduces jitter.
    Type: Application
    Filed: November 16, 2009
    Publication date: March 11, 2010
    Applicant: MKS Instruments, Inc.
    Inventors: Leonid Rosenboim, David Michael Gosch
  • Versatile semiconductor manufacturing controller with statistically repeatable response times
    Patent number: 7620516
    Abstract: The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data collection, monitoring, control and response to commands from a tool host with statistically repeatable performance and precision. Embodiments described use prioritized real time operating systems to control of semiconductor manufacturing tools and data collection from tool associated with the sensors. Statistically repeatable responsiveness to selected commands and to sensor inputs during selected recipe steps effectively reduces jitter.
    Type: Grant
    Filed: April 25, 2006
    Date of Patent: November 17, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: Leonid Rozenboim, David Michael Gosch
  • Method and device for identifying luminescent molecules according to the fluorescence correlation spectroscopy method
    Publication number: 20060226374
    Abstract: The invention relates to a method and device for identifying luminescent molecules according to the fluorescence correlation spectroscopy method.
    Type: Application
    Filed: August 6, 2004
    Publication date: October 12, 2006
    Applicant: Gnothis Holding S.A.
    Inventors: Rudolf Rigler, Theo Lasser, Pierre-Andre Besse, Alexis Rochas, Alexandre Serov, Michael Gosch, Radivoje Popovic