Patents by Inventor Michael Gostkowski

Michael Gostkowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for fabricating sub-resolution line space patterns
    Publication number: 20070052133
    Abstract: Methods for fabricating sub-resolution line space patterns are disclosed. In one embodiment, a method includes steps for fabricating a half-pitch pattern having equal line to space dimension. In other embodiments, method includes steps for fabricating a quarter-pitch pattern having equal line to space dimension.
    Type: Application
    Filed: September 7, 2005
    Publication date: March 8, 2007
    Inventors: Michael Gostkowski, Shu Ikeda, Jeff Wetzel