Abstract: A particle detector includes at least one throttling element which defines an aerodynamic aperture. A light source illuminates a region of the aerodynamic aperture at about a focal point of an aerodynamic lens. A detector is configured to receive a light scattered from one or more particles which traverse the aerodynamic aperture. A method for detecting and measuring particles previously deposited on a surface of a semiconductor manufacturing chamber is also described.

Abstract: Embodiments for automated patient care management are provided by a platform. A patient application executes on a remote device and is configured to present patient data inquiries and, in response, receive patient data at the remote device. The patient data includes data of medication and physical condition. A provider application executes on the platform and is configured to receive and process the patient data from the remote device. The provider application and/or the patient application generates the patient data inquiries using information of the patient data reported during at least one prior session. Numerous provider dashboards include the patient data and controls for interacting with the corresponding patient and recording care data. The provider application, which includes the classification and care notifications on the provider dashboards, automatically controls classification of patients and generates care notifications based on the patient data.

Abstract: In apparatuses and methods for treating a plate-shaped process item including a bottom side, a top side and edges between the bottom side and the top side with a process medium, a transport unit is used, which includes an endless unit with support elements projecting from the same. A bottom side of the plate-shaped process item is supported on support elements of the transport unit and the transport unit is driven to move the support elements together with the supported plate-shaped process item in parallel to a process media level of a process medium. In a first operating mode, during a movement of the plate-shaped process item in parallel to the process media level, no parts of the transport unit engage the edges of the plate-shaped process item.

Abstract: Provided are partially etched dielectric films with raised conductive features. Also provided are methods for forming the raised conductive features in the dielectric films, which methods include partially etching the dielectric films.

Abstract: Provided are partially etched dielectric films with raised conductive features. Also provided are methods for forming the raised conductive features in the dielectric films, which methods include partially etching the dielectric films.

Abstract: An apparatus for generating an inhomogeneous electric field that can produce thrust having a first electrode constructed of a first conducting material, a second electrode constructed of a second conducting material separated from but in proximity of the first electrode and a first and second dielectric material interposed between the first and second electrodes, the first and second dielectric materials having a high and low mass density, respectively.