Abstract: A method for reworking an optical element, in particular for microlithography, wherein the optical element has a first functional layer (203) which is optionally located on a figure individualised with figure processing for use in a first optical system or on an existing carrier layer (202). The method includes: over-coating the first functional layer (203) with an adjustment layer system (204), applying a carrier layer (205) onto the adjustment layer system (204), determining a setpoint wavefront effect for a new use of the optical element, carrying out a layer manipulation depending on the setpoint wavefront effect and applying a second functional layer (206) onto the carrier layer (205), wherein the optical element (200) is a lens or a wavefront correction element.

Abstract: Methods can produce a projection lens. Such a projection lens can be a component of a projection exposure apparatus. Such a projection exposure apparatus can be used in a lithography method.

Abstract: A catadioptric projection lens images a pattern of a mask in an effective object field of the projection lens into an effective image field of the projection lens with electromagnetic radiation with an operating wavelength ?<260 nm. The projection lens includes a multiplicity of lens elements and a multiplicity of mirrors including at least one concave mirror. The lens elements and mirrors define a projection beam path that extends from the object plane to the image plane and contains at least one pupil plane. The mirrors include a first mirror having a first mirror surface in the projection beam path between the object and pupil planes in the optical vicinity of a first field plane optically conjugate to the object plane. The mirrors also include a second mirror having a second mirror surface in the projection beam path between the pupil and image planes in the optical vicinity of a second field plane that is optically conjugate to the first field plane.

Abstract: A system for generating a data structure using graphical models includes a computing device configured to provide a visual interface configured to provide a plurality of graphical models of a plurality of rule modules and receive a relational identification of at least a graphical representation of the plurality of graphical models, the relational indication including at least an entry indication and at least an exit indication, to convert the relational identification into at least a decision tree having at least a root node corresponding and at least a terminal node, to train a machine-learning model to match execution parameters to the at least a root node, and to generate an execution result interface configured to receive at least an execution parameter, map it to the at least a root node using the machine-learning model, and generate an execution result at the at least a terminal node.

Abstract: A catadioptric projection lens images a pattern of a mask in an effective object field of the projection lens into an effective image field of the projection lens with electromagnetic radiation with an operating wavelength ?<260 nm. The projection lens includes a multiplicity of lens elements and a multiplicity of mirrors including at least one concave mirror. The lens elements and mirrors define a projection beam path that extends from the object plane to the image plane and contains at least one pupil plane. The mirrors include a first mirror having a first mirror surface in the projection beam path between the object and pupil planes in the optical vicinity of a first field plane optically conjugate to the object plane. The mirrors also include a second mirror having a second mirror surface in the projection beam path between the pupil and image planes in the optical vicinity of a second field plane that is optically conjugate to the first field plane.

Abstract: A tool changer has two changer module parts that can be coupled with one another. Each module part includes an attachment part and at least one coupling part associated with the attachment part. An adapter plate, including multiple fastening areas, is equipped with a desired number of changer module parts. The adapter plate is removable associated with each of the changer module parts on the attachment part side.