Patents by Inventor Michael Haggmark

Michael Haggmark has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Throttling Element Particle Detector
    Publication number: 20240159641
    Abstract: A particle detector includes at least one throttling element which defines an aerodynamic aperture. A light source illuminates a region of the aerodynamic aperture at about a focal point of an aerodynamic lens. A detector is configured to receive a light scattered from one or more particles which traverse the aerodynamic aperture. A method for detecting and measuring particles previously deposited on a surface of a semiconductor manufacturing chamber is also described.
    Type: Application
    Filed: November 14, 2023
    Publication date: May 16, 2024
    Applicant: Inficon, LLC
    Inventors: Shawn Briglin, Nathan Graff, Silvio Decker, Michael Haggmark