Patents by Inventor Michael Halama

Michael Halama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer inspection device
    Patent number: 7424393
    Abstract: A semiconductor substrate or wafer inspection device for detecting defects on wafer surfaces includes an air-cushion stage which can be displaced in two directions (X,Y) that are perpendicular to one another. Several air nozzles are provided for this purpose. At least one valve is connected to at least one electric control unit, the valve being configured in such a way that a normal pressure prevails in the air nozzles when the electric control unit delivers a corresponding signal.
    Type: Grant
    Filed: May 12, 2004
    Date of Patent: September 9, 2008
    Assignee: Vistec Semiconductor Systems GmbH
    Inventors: Michael Halama, Albert Kreh, Guenter Schmidt
  • Wafer inspection device
    Publication number: 20070040241
    Abstract: The invention relates to a wafer inspection device. The device comprises an air-cushion stage which can be displaced in two directions (X,Y) that are perpendicular to one another. Several air nozzles are provided for this purpose. At least one valve is connected to at least one electric control unit, the valve being configured in such a way that a normal pressure prevails in the air nozzles when the electric control unit delivers a corresponding signal.
    Type: Application
    Filed: May 12, 2004
    Publication date: February 22, 2007
    Inventors: Michael Halama, Albert Kreh, Guenter Schmidt