Patents by Inventor Michael Haplin

Michael Haplin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for adjusting a pedestal assembly for a reactor
    Patent number: 11417563
    Abstract: The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired.
    Type: Grant
    Filed: July 6, 2021
    Date of Patent: August 16, 2022
    Assignee: ASM America, Inc.
    Inventor: Michael Haplin
  • APPARATUS AND METHOD FOR ADJUSTING A PEDESTAL ASSEMBLY FOR A REACTOR
    Publication number: 20210335652
    Abstract: The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired.
    Type: Application
    Filed: July 6, 2021
    Publication date: October 28, 2021
    Applicant: ASM IP Holding B.V.
    Inventor: Michael Haplin