Patents by Inventor Michael HENFLING

Michael HENFLING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device and method of producing a semiconductor device
    Patent number: 11167981
    Abstract: A method of producing a semiconductor device includes providing a carrier structure having a semiconductor substrate; applying or introducing a precursor substance onto or into the carrier structure, treating the precursor substance for producing a porous matrix structure; introducing a functionalization substance into the porous matrix structure.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: November 9, 2021
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Sabine Trupp, Michael Henfling, Karl Neumeier
  • SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
    Publication number: 20200062586
    Abstract: A method of producing a semiconductor device includes providing a carrier structure having a semiconductor substrate; applying or introducing a precursor substance onto or into the carrier structure, treating the precursor substance for producing a porous matrix structure; introducing a functionalization substance into the porous matrix structure.
    Type: Application
    Filed: October 30, 2019
    Publication date: February 27, 2020
    Inventors: Sabine TRUPP, Michael HENFLING, Karl NEUMEIER
  • Semiconductor device and method of producing a semiconductor device
    Patent number: 10519034
    Abstract: A method of producing a semiconductor device includes providing a carrier structure having a semiconductor substrate; applying or introducing a precursor substance onto or into the carrier structure, treating the precursor substance for producing a porous matrix structure; introducing a functionalization substance into the porous matrix structure.
    Type: Grant
    Filed: January 19, 2018
    Date of Patent: December 31, 2019
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Sabine Trupp, Michael Henfling, Karl Neumeier
  • SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
    Publication number: 20180208459
    Abstract: A method of producing a semiconductor device includes providing a carrier structure having a semiconductor substrate; applying or introducing a precursor substance onto or into the carrier structure, treating the precursor substance for producing a porous matrix structure; introducing a functionalization substance into the porous matrix structure.
    Type: Application
    Filed: January 19, 2018
    Publication date: July 26, 2018
    Inventors: Sabine TRUPP, Michael HENFLING, Karl NEUMEIER