Abstract: A novel fluid valve system includes a housing defining a fluid path between first and second ports. The housing preferably includes an interior cylindrically-arcuate surface that defines a center of curvature, with the fluid flow path passing through an opening in the interior cylindrically-arcuate surface. The fluid valve may include a foot having a bottom and a heel, with the bottom facing the interior cylindrically-arcuate surface, and with the heel disposed transverse to the bottom. The foot may extend in a radial direction away from the center of curvature, with the foot pivoting within an operational angular range about the center of curvature. The bottom of the foot may be configured to translate over the opening in the interior cylindrically-arcuate surface, and the heel may be configured to abut the second port with the foot pivoted to a closed position of the operational angular range.

Abstract: The present invention provides a method and apparatus for high-speed autofocus and tilt of an inspection surface in a microscope system. The method and apparatus herein described projects an array of spots, lines, circles, grids or other shapes on the surface to be adjusted. The superposition of the array on the surface is imaged by a CCD camera and captured for subsequent analysis. Analysis of the captured image determines both the distance and angle through which the surface must be adjusted to bring it into the focal plane of the optical system. Focus and tilt error is estimated by comparing image dilation and distortion with calibrated data.