Patents by Inventor Michael Hoell

Michael Hoell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
    Patent number: 7277188
    Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: October 2, 2007
    Assignees: Cymer, Inc., Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Palash P. Das, Thomas Hofmann, Otto Boucky, Ernst Stump, Berthold Matzkovits, Michael Hoell, Joerg Walther, Kurt Brenner, Guenter Grupp
  • Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
    Publication number: 20060001878
    Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.
    Type: Application
    Filed: May 26, 2005
    Publication date: January 5, 2006
    Applicants: Cymer, Inc., Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Palash Das, Thomas Hofmann, Richard Sandstrom, Otto Boucky, Ernst Stumpp, Berthold Matzkovits, Michael Hoell, Joerg Walther, Kurt Brenner, Guenter Grupp