Abstract: A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

Abstract: A mass flow measurement device includes a flow sensor tube and a housing having the flow sensor tube situated therein. A drive device is positioned outside the housing for vibrating the flow sensor tube, and at least one pick off sensor is situated relative to the flow sensor tube so as to measure the twist in the flow sensor tube due to Coriolis force. Another mass flow measurement device includes an enclosure having first and second ends. A first sealing member is situated relative to the enclosure first end and a flow body such that the flow body and the first end are connected in a sealed manner. A second sealing member is situated relative to the enclosure second end and a user interface assembly such that the user interface assembly and the second end are connected in a sealed manner.

Abstract: A Coriolis mass flow sensor includes a flow sensor tube, a drive device situated relative to the flow sensor tube so as to cause the flow sensor tube to vibrate, and capacitance displacement gauges situated relative to the flow sensor tube so as to measure the twist in the flow sensor tube due to Coriolis force. In specific embodiments, electromagnetic, electrostatic, acoustic, and/or piezoelectric drives are used to vibrate the flow sensor tube. In still further embodiments, piezoelectric devices are used both to vibrate the flow sensor tube and measure the twist in the flow sensor tube. In accordance with certain embodiments of the invention, the Coriolis mass flow controller further includes an integrated flow control device adapted to receive fluid from the flow sensor tube and provide flow control.

Abstract: A Coriolis mass flow sensor includes a flow tube, a light source positioned adjacent a first side of the flow tube and a light detector positioned adjacent a second side of the flow tube. A drive device is operatively situated relative to the flow tube for vibrating the flow tube, such that the flow tube moves through a path defined between the light source and the light detector. In other aspects of the invention, a Coriolis mass flow sensor includes a flow tube and a frame having the flow tube mounted thereon. A drive device is operatively situated relative to the frame for vibrating the frame and at least one pick off sensor is situated relative to the flow tube so as to measure the twist in the flow tube due to Coriolis force. Other aspects of the invention concern a straight-tube Coriolis mass flow sensor. A flexible flow tube defines a generally linear flow path.

Abstract: A mass flow measurement and control device includes an enclosure with a Coriolis mass flowmeter situated therein. The Coriolis mass flowmeter has a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube. A pinch valve includes an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube. An actuator with a ram operatively connected thereto is situated adjacent the elastomeric tube, and a reference surface is positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. A controller may also be provided, which receives an output signal from the Coriolis flowmeter and provides a control output signal to the pinch valve actuator in response to the flowmeter output signal and a setpoint signal.

Abstract: A mass flow measurement device includes a flow sensor tube and a housing having the flow sensor tube situated therein. A drive device is positioned outside the housing for vibrating the flow sensor tube, and at least one pick off sensor is situated relative to the flow senior tube so as to measure the twist in the flow sensor tube due to Coriolis force Another mass flow measurement device includes an enclosure having first and second ends. A first sealing member is situated relative to the enclosure first end and a flow body such that the flow body and the first end are connected in a sealed manner. A second sealing member is situated relative to the enclosure second end and a user interface assembly such that the user interface assembly and the second end are connected in a sealed manner.

Abstract: A Coriolis mass flow sensor includes a flow sensor tube, a drive device situated relative to the flow sensor tube so as to cause the flow sensor tube to vibrate, and capacitance displacement gauges situated relative to the flow sensor tube so as to measure the twist in the flow sensor tube due to Coriolis force. In specific embodiments, electromagnetic, electrostatic, acoustic, and/or piezoelectric drives are used to vibrate the flow sensor tube. In still further embodiments, piezoelectric devices are used both to vibrate the flow sensor tube and measure the twist in the flow sensor tube. In accordance with certain embodiments of the invention, the Coriolis mass flow controller further includes an integrated flow control device adapted to receive fluid from the flow sensor tube and provide flow control.

Abstract: A mass flow measurement and control device includes an enclosure with a Coriolis mass flowmeter situated therein. The Coriolis mass flowmeter has a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube. A pinch valve includes an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube. An actuator with a ram operatively connected thereto is situated adjacent the elastomeric tube, and a reference surface is positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. A controller may also be provided, which receives an output signal from the Coriolis flowmeter and provides a control output signal to the pinch valve actuator in response to the flowmeter output signal and a setpoint signal.

Abstract: A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

Abstract: A capacitive pick off sensor for a mass flow measurement device is disclosed. The mass flow measurement device includes a flow sensor tube and a drive device for vibrating the flow sensor tube. The capacitive pick off sensor includes at least one conductive plate connectable to a first voltage potential and adapted to be situated adjacent the flow sensor tube which is connected to a second voltage potential. The conductive plate is positioned relative to the flow sensor tube so as to define a gap therebetween The capacitance between the conductive plate and the flow sensor tube varies due to the relative motion of the conductive plate and the flow sensor tube when the flow sensor tube is vibrated. In other aspects of the present invention, the flow sensor tube is situated in a housing and the drive device is positioned outside the housing for vibrating the flow sensor tube.

Abstract: A Coriolis mass flow sensor includes a flow sensor tube, a drive device situated relative to the flow sensor tube so as to cause the flow sensor tube to vibrate, and capacitance displacement gauges situated relative to the flow sensor tube so as to measure the twist in the flow sensor tube due to Coriolis force. In specific embodiments, electromagnetic, electrostatic, acoustic, and/or piezoelectric drives are used to vibrate the flow sensor tube. In still further embodiments, piezoelectric devices are used both to vibrate the flow sensor tube and measure the twist in the flow sensor tube. In accordance with certain embodiments of the invention, the Coriolis mass flow controller further includes an integrated flow control device adapted to receive fluid from the flow sensor tube and provide flow control.

Abstract: A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.