Patents by Inventor Michael J. Grieco

Michael J. Grieco has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device lithography using multi-level resist systems
    Patent number: 4532005
    Abstract: In order to hard-bake the bottom resist layer of a tri-level resist system for patterning a device wafer, the resist is subjected to a positive ramp heating step (of increasing ambient temperatures).
    Type: Grant
    Filed: May 21, 1984
    Date of Patent: July 30, 1985
    Assignee: AT&T Bell Laboratories
    Inventors: Michael J. Grieco, Laura P. Hale