Abstract: A method of making an electronic device in which a conductive electrode has been formed over a substrate including using a liquid to clean the conductive electrode, heating in a processing station the conductive electrode to a temperature which dries the conductive electrode and thereby removes residual cleaning liquid applied during the cleaning step, and providing an oxidizing plasma in the processing station to modify the properties of the conductive electrode. The method also includes producing a fluorocarbon plasma in the processing station to form a fluorocarbon layer over the modified conductive electrode, and further processing the structure to produce the electronic device.

Abstract: An apparatus for treating paper web materials with a plasma, said apparatus comprising a dark space generated by a treatment electrode in a treatment zone. There is a counter electrode having a surface area in said treatment zone which is not greater than a surface area of said counter electrode. A power supply is included for driving either said treatment electrode or said counter electrode with an oscillating high voltage at a frequency less than about 2 MHz and greater than 1/tc where tc is the charging time of a web surface exposed to a rms ion current in the plasma.

Abstract: A method and apparatus are taught for treating paper webs for obtaining the proper surface characteristics to promote adhesion of nonphotosensitive coating materials and/or layers typically coated thereon. The web is passed through a high-voltage sheath region or dark space of the plasma generated by a powered electrode residing in a discharge zone. The frequency of the driving voltage must be above a lower bound dictated by the properties of the paper support and the plasma, and it must be below an upper bound beyond which the sheath voltages drop significantly and it is observed that the benefits of this approach diminish. The dark space is generated by a treatment electrode in a treatment zone. There is a counter electrode having a surface area in said treatment zone which is at least as great as the surface area of the treatment electrode.

Abstract: An apparatus for treating paper web materials with a plasma, said apparatus comprising a dark space generated by a treatment electrode in a treatment zone. There is a counter electrode having a surface area in said treatment zone which is not greater than a surface area of said counter electrode. A power supply is included for driving either said treatment electrode or said counter electrode with an oscillating high voltage at a frequency less than about 2 MHz and greater than 1/tc where tc is the charging time of a web surface exposed to a rms ion current in the plasma.

Abstract: A method and apparatus are taught for treating polyolefin containing or polyolefin-coated webs or laminates for obtaining the proper surface characteristics to promote adhesion of photosensitive coating materials and/or layers typically coated thereon. The web is passed through a high-voltage sheath region or dark space of the plasma generated by a powered electrode residing in a discharge zone. The frequency of the driving voltage must be above a lower bound dictated by the properties of the paper support and the plasma, and it must be below an upper bound beyond which the sheath voltages drop significantly and it is observed that the benefits of this approach diminish. The dark space is generated by a treatment electrode in a treatment zone. There is a counter electrode having a surface area in said treatment zone which is at least as great as the surface area of the treatment electrode.