Abstract: A method for forming a plurality of parallel metal lines on a substrate of thin film elastomeric material and a wire grid polarizer formed by such method. A sacrificial layer is formed by coating the substrate with a water soluble polymer while the substrate is stretched. The existing tensile force is removed, leaving an undulating topology of buckled sacrificial layer material. A masking layer is then deposited at an oblique angle and then fractured into parallel lines of material by application of a second tensile force. Unmasked portions of the sacrificial layer are removed by dry etch. A metallic layer is then deposited and a lift off process employed to remove remaining portions of the sacrificial layer and materials deposited thereover. Upon removal of the second tensile force, the substrate returns to its unstressed length with metal lines of predetermined periodicity thereon.

Abstract: A detunable Fabry-Perot interferometer, and method of tuning a Fabry-Perot interferometer are provided. The Fabry-Perot interferometer includes a first mirror, a second mirror oriented with respect to the first mirror so as to define a Fabry-Perot cavity therebetween, and an actuator configured to adjust a resonant wavelength of the Fabry-Perot cavity by varying a gap between the first and second mirrors, wherein the actuator is configured to selectively maintain the first and second mirrors in a substantially non-parallel relationship while the resonant wavelength of the Fabry-Perot interferometer is varied. The detunable Fabry-Perot interferometer can be employed in a multiplexer of a telecommunications system, as provided.

Abstract: A method of making a micro electromechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on a first substrate or wafer; and at least one contact structure and a mating structure are defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures. The mating structure of the first substrate is moved into a confronting relationship with the mating structure of the second substrate or wafer. Pressure is applied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer. Then the first substrate or wafer is removed to free the cantilevered beam structure for movement relative to the second substrate or wafer.

Abstract: The present invention provides method of making mechanisms in which the relative locations of elements are maintained during manufacturing. The methods according to the present invention can be used to make a variety of devices, including tunable optical devices. The methods include displaceably attaching an island (support) to a frame with a non-rigid material.

Abstract: The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices that are more reliable, more cost effective and/or exhibit better performance than prior art devices.

Abstract: A method of making a micro electromechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on a first substrate or wafer; and at least one contact structure and a mating structure are defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures. The mating structure of the first substrate is moved into a confronting relationship with the mating structure of the second substrate or wafer. Pressure is applied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer. Then the first substrate or wafer is removed to free the cantilevered beam structure for movement relative to the second substrate or wafer.

Abstract: A method of making a micro electro-mechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on a first substrate or wafer; and at least one contact structure and a mating structure are defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures. The mating structure of the first substrate is moved into a confronting relationship with the mating structure of the second substrate or wafer. Pressure is applied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer. Then the first substrate or wafer is removed to free the cantilevered beam structure for movement relative to the second substrate or wafer.

Abstract: A cost-effective broadband tunable Fabry-Perot interferometer uses entropic, rather than enthalpic, materials to provide the compliant support for the interferometer's movable mirror. Entropic materials exhibit an entropic plateau region over a wide frequency range with a Young's modulus much lower than enthalpic materials, linear elastic behavior over a wide deformation range, and, in certain geometries, energy and stress behavior that tend to stabilize the movable mirror during deformation. The compliant support can be configured in a variety of geometries including compression, tension, sheer and diaphragm and of a variety of materials including elastomers, aerogels or other long chained polymers.

Abstract: A detunable Fabry-Perot interferometer, and method of tuning a Fabry-Perot interferometer are provided. The Fabry-Perot interferometer includes a first mirror, a second mirror oriented with respect to tie first mirror so as to define a Fabry-Perot cavity therebetween, and an actuator configured to adjust a resonant wavelength of the Fabry-Perot cavity by varying a gap between the first and second mirrors, wherein the actuator is configured to selectively maintain the first and second mirrors in a substantially non-parallel relationship while the resonant wavelength of the Fabry-Perot interferometer is varied. The detunable Fabry-Perot interferometer can be employed in a multiplexer of a telecommunications system, as provided.

Abstract: A hybrid process combines a thin-film surface micromachining process such as by sputtering, evaporation or chemical vapor deposition with a thick-film surface micromachining and release process such as dry-film lamination. Such combination results in thin film micro-structures with all the benefits of surface micromachining without the typical problems of stiction and limited range of motion.

Abstract: A low cost waveguide tunable Bragg grating provides a flat passband and minimal crosstalk. A compliant material forms a waveguide that is imprinted with a Bragg grating and mounted on a MEMS actuator. Entropic materials such as elastomers, aerogels or other long-chain polymers may provide the necessary compliance. The application of a drive signal to the actuator deforms (squeezes or stretches) the compliant material thereby changing the Bragg spacing and shifting the resonant wavelength. The MEMS actuator can be an electrostatically or electromagnetically actuated comb-drive.

Abstract: A cost-effective tunable optical component uses entropic, rather than enthalpic, materials to provide a compliant member that supports the optical element and is driven by an electrostatic actuator. Entropic materials exhibit an entropic plateau region over a wide frequency range with a Young's modulus much lower than enthalpic materials, linear elastic behavior over a wide deformation range, and, in certain geometries, energy and stress behavior that tend to stabilize the optical element during deformation. The compliant member can be configured in a variety of geometries including compression, tension, tensile/compressive and shear and of a variety of materials including elastomers, aerogels or other long chained polymers.

Abstract: The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices that are more reliable, more cost effective and/or exhibit better performance than prior art devices.

Abstract: The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices that are more reliable, more cost effective and/or exhibit better performance than prior art devices.

Abstract: A tunable laser system is provided which includes a tunable laser. The tunable laser combines a laser with a compliant mechanism.

Abstract: The present invention provides method of making mechanisms in which the relative locations of elements are maintained during manufacturing. The methods according to the present invention can be used to make a variety of devices, including tunable optical devices. The methods include displaceably attaching an island (support) to a frame with a non-rigid material.

Abstract: A sequence of MEMS processing steps are used to construct a 2D optical switch on a single substrate. In a typical optical switch configuration, an array of hinged micromirrors are supported by an array of posts at a 45° angle to the input and output optical paths and positioned parallel to the substrate either above, below or, perhaps, in the optical paths. The application of a voltage between the mirror and its control electrodes switches the mirror to a vertical position where it intercepts and deflects light travelling down the optical paths. The posts are suitably oriented at a 90° angle with respect to the mirror hinges so that they do not interfere with the optical paths and, may be configured to function as baffles to reduce crosstalk between adjacent optical paths.

Abstract: An array of micromachined mirrors are arranged on a first substrate at the intersections of input and output optical paths and oriented at approximately forty-five degrees to the paths. An array of split-electrodes are arranged on a second substrate above the respective mirrors. Each split electrode includes a first electrode configured to apply an electrostatic force that rotates the mirror approximately ninety degrees into one of the input optical paths to deflect the optical signal along one of the output optical paths, and a second electrode configured to apply an electrostatic force that maintains the mirror position. Stability may be improved by using the first and second electrodes in combination to first actuate the mirror and then balance the forces on the mirror to maintain its position. Reproducibly accurate positioning of the mirrors requires either the use of active positioning control or of mechanical stops.

Abstract: A low cost waveguide tunable Bragg grating provides a flat passband and minimal crosstalk. A compliant material forms a waveguide that is imprinted with a Bragg grating and mounted on a MEMS actuator. Entropic materials such as elastomers, aerogels or other long-chain polymers may provide the necessary compliance. The application of a drive signal to the actuator deforms (squeezes or stretches) the compliant material thereby changing the Bragg spacing and shifting the resonant wavelength. The MEMS actuator can be an electrostatically or electromagnetically actuated comb-drive.

Abstract: A cost-effective tunable optical component uses entropic, rather than enthalpic, materials to provide a compliant member that supports the optical element and is driven by an electrostatic actuator. Entropic materials exhibit an entropic plateau region over a wide frequency range with a Young's modulus much lower than enthalpic materials, linear elastic behavior over a wide deformation range, and, in certain geometries, energy and stress behavior that tend to stabilize the optical element during deformation. The compliant member can be configured in a variety of geometries including compression, tension, tensile/compressive and shear and of a variety of materials including elastomers, aerogels or other long chained polymers.