Patents by Inventor Michael J. McGranaghan

Michael J. McGranaghan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shallow trench isolation planarization using self aligned isotropic etch
    Patent number: 6686283
    Abstract: A method for forming planar isolation structures for integrated circuits. A etch barrier is formed over the isolation fill material and an etch back is performed to remove material above unetched portions of the substrate. The exposed fill material is etched and planarized to form a planar isolation structure.
    Type: Grant
    Filed: February 4, 2000
    Date of Patent: February 3, 2004
    Assignee: Texas Instruments Incorporated
    Inventors: Shawn T. Walsh, John E. Campbell, Somit Joshi, James B. Friedmann, Michael J. McGranaghan, Janice D. Makos, Arun Sivasothy, Troy A. Yocum, Jaideep Mavoori, Wayne A. Bather, Joe G. Tran, Ju-Ai Ruan, Michelle L. Hartsell, Gregory B. Shinn