Abstract: A method of homogenizing light includes the steps of providing a plurality of large diameter lenses selected from a group of lenses consisting of positive or negative spherical, positive or negative cylindrical lenses and positive or negative axicons, selecting a predetermined number of lenses from the group of lenses, segmenting each selected lens in a manner common to all selected lenses, selecting from each lens a predetermined number of lens segments, and arranging the selected lens segments in a predetermined array so that the light passing through each lens segment, when arranged in the predetermined array, recombines at a common plane.

Abstract: A high precision refractive scanner includes a light source that generates a light beam, a lens pair including a stationary plano-concave lens and a movable plano-convex lens, a thin film-covered panel, and an F-theta lens that focuses the light beam that passes through the lens pair onto the panel. The plano-convex lens has an initial position where a first edge is in refracting relation to the light beam and a final position where a second edge is in refracting relation to the light beam. The plano-convex lens rotates about a pivot point that represents the origin of the respective radii of curvatures of both lenses with a nominal air gap between the two lenses. Rotation of the plano-convex lens causes the light beam to be refracted over a predetermined scan angle. A focal spot forms a scribe when it travels from a first to a second edge of the panel.

Abstract: A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel windows are mounted to a galvanometer motor and positioned orthogonally to one another. The focused laser beam is therefore displaced in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. A field size of one thousand microns is achieved.

Abstract: A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.

Abstract: A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel windows are mounted to a galvanometer motor and positioned orthogonally to one another. The focused laser beam is therefore displaced in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. A field size of one thousand microns is achieved.

Abstract: A method of homogenizing light includes the steps of providing a plurality of large diameter lenses selected from a group of lenses consisting of positive or negative spherical, positive or negative cylindrical lenses and positive or negative axicons, selecting a predetermined number of lenses from the group of lenses, segmenting each selected lens in a manner common to all selected lenses, selecting from each lens a predetermined number of lens segments, and arranging the selected lens segments in a predetermined array so that the light passing through each lens segment, when arranged in the predetermined array, recombines at a common plane.

Abstract: A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.

Abstract: A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.

Abstract: A failure analysis system and method for multi-layer semiconductor devices, including a molecular fluorine laser system for producing a 157 nm beam and an imaging system for imaging the beam onto the semiconductor device. The laser beam etches away one or more top (passivation) layers to expose layers disposed underneath. Circuitry formed in exposed layers can then be tested.

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber and connected to the discharge circuit for energizing the gas mixture, a resonant cavity including the discharge chamber for generating a laser beam, and an intracavity homogenizer for homogenizing an intensity profile of the laser beam generated in the resonator. The intracavity homogenizer may include each of a first bi-prism and a second bi-prism disposed at opposite ends of the resonant cavity and having the discharge chamber disposed therebetween. In this case, optical axes of the first bi-prism and the second bi-prism are each at least substantially parallel to the optical axis of the laser beam.

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber and connected to the discharge circuit for energizing the gas mixture, a resonant cavity including the discharge chamber for generating a laser beam, and an intracavity homogenizer for homogenizing an intensity profile of the laser beam generated in the resonator. The intracavity homogenizer may include each of a first bi-prism and a second bi-prism disposed at opposite ends of the resonant cavity and having the discharge chamber disposed therebetween. In this case, optical axes of the first bi-prism and the second bi-prism are each at least substantially parallel to the optical axis of the laser beam.

Abstract: A laser machining apparatus includes a nozzle connected to a pressurized gas and liquid reservoir for propelling a fine spray, mist or stream of a liquid such as water at the workpiece to be machined. A laser beam, preferably as may be generated by a UV laser or other source of exposure radiation, but is not strongly absorbed by the liquid assist material, is focused to the workpiece using, e.g., a focusing or imaging lens, while the fine spray, mist or liquid stream is propelled at the workpiece creating a layer of the liquid on its surface as the beam is incident upon the workpiece for machining.

Abstract: A failure analysis system and method for multi-layer semiconductor devices, including a molecular fluorine laser system for producing a 157 nm beam and an imaging system for imaging the beam onto the semiconductor device. The laser beam etches away one or more top (passivation) layers to expose layers disposed underneath. Circuitry formed in exposed layers can then be tested.

Abstract: A solid state laser system that includes a resonant cavity, a gain medium disposed the resonant cavity and a plurality of optical pump sources. The resonant cavity is defined by an output coupler, a high reflector, and a plurality of retro-reflecting optical elements. The gain medium has at least a first pair of facets that oppose each other and a second pair of facets that oppose each other, so as to form a shape such as a cube or hexagon. The plurality of optical pump sources each produce an optical pump output that is incident upon one of the facets for exciting the gain medium to generate an intracavity light beam that oscillates in the resonant cavity. The resonant cavity and gain medium are oriented so that, during a single trip through the resonant cavity, the beam makes a plurality of passes through the gain medium. During one pass, the beam passes directly through the gain medium by entering and exiting the gain medium through the first pair of facets.

Abstract: The present invention is directed to an unstable laser resonator. The present invention includes a first mirror located adjacent one end of a laser gain medium, and a second output mirror/lens where one surface acts as a mirror and the other surface acts as a collimating lens located adjacent an opposite end of a laser gain medium. Both mirrors include combinations of convex, concave and plano surfaces in order to achieve small fresnel number light with diffraction limited light properties and high energy extraction associated with a large fresnel number. The output coupler provides a means to extract and collimate the light out of the cavity and feedback into the laser gain medium high quality laser light for sustaining the diffraction limited performance while the gain medium is excited.