Patents by Inventor Michael J. Singleton

Michael J. Singleton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etching device and process
    Patent number: 5099100
    Abstract: Plasma etching device and process in which a chamber is divided into two regions by a perforated screen. Objects to be etched are placed in one region, and a plasma is formed in the other region. Etching occurs in the first region, and structure is included for heating the etched objects in the first region to facilitate the removal of photoresist used to define the areas to be etched.
    Type: Grant
    Filed: September 29, 1989
    Date of Patent: March 24, 1992
    Assignee: Branson International Plasma Corporation
    Inventors: Richard L. Bersin, Michael J. Singleton