Abstract: A sample positioning stage for positioning a sample to be inspected relative to an optical inspection device, including a first generally planar body on which a sample can be carried and a second body directly coupled to the first body via at least one rigid bearing and at least one resiliently compliant bearing provided between the first and second bodies. The first and second bodies are preloaded against each other in a dimension substantially parallel to the plane of the first generally planar body via the bearings. The stage also includes a motorized drive system operable to drive the first and second bodies relative to each other in the first plane toward a demanded relative position received from a position input device, and a position sensing device on at least one of the first and second bodies, for providing a measure of the relative position of the first and second bodies.