Abstract: A method of treating a substrate including providing a fluid treatment apparatus including a first sheet of material having a plurality of spaced apart drive rod receiving passages extending therethrough and through an upper surface thereof. An inside surface of each drive rod passage provides a bearing surface for a drive rod. At least one fluid passage is provided between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods at least partially extend above the upper surface of the first sheet. A second sheet of material has a plurality of spaced apart drive rod receiving passages extending therethrough and through a lower surface thereof. An inside surface of each drive rod passage provides a bearing surface for a drive rod. At least one fluid passage is provided between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods at least partially extend below the upper surface of the second sheet.

Abstract: A fluid treatment apparatus, including a lower substrate transportation and fluid head including a plurality of lower drive rod members provided in a plurality of spaced apart lower drive rod member receiving passages. The lower drive rod members at least partially extend through an upper surface of the lower substrate transportation and fluid head. A plurality of fluid injector passages and fluid drain passages are provided between the lower drive rod members. An upper substrate transportation and fluid head is provided including a plurality of upper drive rod members provided in a plurality of spaced apart drive upper rod member receiving passages. The upper drive rod members at least partially extending through a lower surface of the upper substrate transportation and fluid head. A plurality of fluid injector passages and fluid drain passages are provided between the upper drive rod members. A fluid supply apparatus supplies fluid to the fluid injector passages.

Abstract: A method of forming a fluid treatment apparatus including providing a first and second sheets each having upper, lower, and side surfaces. A plurality of drive rod passages is formed through the first sheet between the side surfaces and through the upper surface. An inside surface of each drive rod passage is continuous with the upper surface and provides a bearing surface for a drive rod. At least one fluid injection passage and at least one fluid drain passage are formed through the first sheet between the upper and lower surfaces between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods are rotatably supported by the bearing surfaces and extend above the upper surface. A plurality of drive rod passages is formed through the second sheet between the side surfaces and through the lower surface. An inside surface of each drive rod passage is continuous with the lower surface of the second sheet and provides a bearing surface for a drive rod.