Abstract: An apparatus for laser machining a workpiece includes a beam shaping device for forming a focal zone from an input laser beam incident on the beam shaping device, and a telescope device for imaging the focal zone into a material of the workpiece. The beam shaping device is configured to impose a phase on a beam cross section of the input laser beam in such a way that the focal zone extends along a longitudinal centre axis which is curved at least in certain portions. The telescope device is assigned a beam splitting device for splitting an output laser beam output coupled from the beam shaping device into a plurality of polarized partial beams, each of which has one of at least two different polarization states. The focal zone has an asymmetrical cross section in a plane oriented perpendicular to the longitudinal centre axis.

Abstract: A method for separating an ultrathin glass using ultrashort laser pulses of an ultrashort pulse laser includes focusing the ultrashort laser pulses into the ultrathin glass such that a resulting focal zone is elongated in a beam direction and extends over an entire thickness of the ultrathin glass. The ultrashort laser pulses have a non-radially symmetric beam cross section perpendicular to a beam propagation direction. The method further includes introducing material modifications into the ultrathin glass along a separating line using the ultrashort laser pulses focused into the ultrathin glass, and separating the ultrathin glass along the separating line.

Abstract: An optical arrangement converts a laser beam into a line-type beam having a line-type beam cross-section that extends along a line direction with a non-vanishing intensity. The arrangement has: reshaping optics having: an input aperture through which the laser beam is radiated in; and an elongate output aperture, the reshaping optics being configured such that the laser beam radiated in is converted into a beam packet with beam segments that emerge through the output aperture; homogenization optics, which contribute to the conversion of the beam packet into the line-type output beam, and by which different beam segments are mixed and superposed along the line direction; and redirection optics configured to redirect the laser beam such that an incidence position/direction of laser beam on the input aperture is changed in dependence on time.