Patents by Inventor Michael K. Yetzbacher
Michael K. Yetzbacher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230105874Abstract: A technique is provided for weakly coupling an absorber to a plasmonic device by placing an isolation layer in between them. This technique enables the spectral selective nature of a plasmonic device to be used in conjunction with an absorber. This technique optimizes the trade-off of near-field coupling and spectral selectivity to allow for deep sub-pixel examination of a scene, and is thus suited for multispectral imagers, among other applications.Type: ApplicationFiled: September 23, 2022Publication date: April 6, 2023Inventors: Heath Gemar, Michael K. Yetzbacher
-
Publication number: 20220276095Abstract: Systems and methods for remote sensing in a plurality of dimensions simultaneously are provided. The plurality of dimensions include imaging, spectral sensing, and ranging at a range resolution that is orders of magnitude finer than the native time resolution of a detector used in the system.Type: ApplicationFiled: February 24, 2022Publication date: September 1, 2022Inventors: Michael K. Yetzbacher, Samuel D. Park, Vasanthi Sivaprakasam
-
Patent number: 10473692Abstract: A method of calibrating a topography metrology instrument using a calibration reference, which includes a substrate and a plurality of bi-layer stacks. Each bi-layer stack includes a plurality of bi-layer steps. At least one bi-layer step of the plurality of bi-layer steps includes two materials. The at least one bi-layer step of the plurality of bi-layer steps includes an etch stop layer and a bulk layer. The calibration reference includes a calibration reference step profile includes a plurality of predetermined bi-layer stack heights. The calibration reference step profile and the predetermined bi-layer stack heights are measured using a topography metrology instrument. The topography metrology instrument is calibrated based on the measured calibration reference step profile and the measured bi-layer stack heights.Type: GrantFiled: September 22, 2015Date of Patent: November 12, 2019Assignee: The Government of the United States of America, as represented by the Secretary of the NavyInventors: Marc Christophersen, Bernard F. Phlips, Andrew J. Boudreau, Michael K. Yetzbacher
-
Patent number: 10139531Abstract: A camera system includes a mosaic optical color filter array, which includes a plurality of repeating unit cells that enforce spectral consistency and spatial uniformity. Each repeating unit cell of the plurality of repeating unit cells satisfies a minimum focal-plane array perimeter criterion and a minimum perimeter to area ratio criterion. The spatial arrangement of bands within the repeating unit cell minimizes inter-band correlation between nearest neighbors. The camera system further includes as short-wave infrared detector optically coupled to the mosaic optical color filter array. Optionally, the mosaic optical color filter array includes at least five spectral bands. The plurality of repeating unit cells includes the at least five spectral bands.Type: GrantFiled: September 11, 2015Date of Patent: November 27, 2018Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Michael K. Yetzbacher, Michael Wilson
-
Patent number: 9997555Abstract: A device includes a surface profile optical element, including a substrate and a plurality of bi-layer stacks on the substrate. Each bi-layer stack of the plurality of bi-layer stacks includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch-stop layer and a bulk layer. The etch stop layer includes an etch stop layer index of refraction. The bulk layer includes a bulk layer index of refraction. A ratio of the etch stop layer index of retraction and the bulk layer index of refraction is between 0.75 and 1.25.Type: GrantFiled: May 17, 2017Date of Patent: June 12, 2018Assignee: The Government of the United States of America, as represented by the Secretary of the NavyInventors: Marc Christophersen, Bernard F. Phlips, Michael K. Yetzbacher
-
Patent number: 9915563Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.Type: GrantFiled: February 18, 2016Date of Patent: March 13, 2018Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Michael K. Yetzbacher, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
-
Publication number: 20180040654Abstract: A device includes a surface profile optical element, including a substrate and a plurality of bi-layer stacks on the substrate. Each bi-layer stack of the plurality of bi-layer stacks includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch-stop layer and a bulk layer. The etch stop layer includes an etch stop layer index of refraction. The bulk layer includes a bulk layer index of refraction. A ratio of the etch stop layer index of retraction and the bulk layer index of refraction is between 0.75 and 1.25.Type: ApplicationFiled: May 17, 2017Publication date: February 8, 2018Inventors: Marc Christophersen, Bernard F. Phlips, Michael K. Yetzbacher
-
Publication number: 20160161336Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.Type: ApplicationFiled: February 18, 2016Publication date: June 9, 2016Applicant: The Government of the US, as represented by the Secretary of the NavyInventors: MICHAEL K. YETZBACHER, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
-
Patent number: 9304040Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.Type: GrantFiled: May 20, 2014Date of Patent: April 5, 2016Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Michael K. Yetzbacher, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
-
Publication number: 20160091703Abstract: A method of calibrating a topography metrology instrument using a calibration reference, which includes a substrate and a plurality of bi-layer stacks. Each bi-layer stack includes a plurality of bi-layer steps. At least one bi-layer step of the plurality of bi-layer steps includes two materials. The at least one bi-layer step of the plurality of bi-layer steps includes an etch stop layer and a bulk layer. The calibration reference includes a calibration reference step profile includes a plurality of predetermined bi-layer stack heights. The calibration reference step profile and the predetermined bi-layer stack heights are measured using a topography metrology instrument. The topography metrology instrument is calibrated based on the measured calibration reference step profile and the measured bi-layer stack heights.Type: ApplicationFiled: September 22, 2015Publication date: March 31, 2016Inventors: Marc Christophersen, Bernard F. Phlips, Andrew J. Boudreau, Michael K. Yetzbacher
-
Publication number: 20160077253Abstract: A camera system includes a mosaic optical color filter array, which includes a plurality of repeating unit cells that enforce spectral consistency and spatial uniformity. Each repeating unit cell of the plurality of repeating unit cells satisfies a minimum focal-plane array perimeter criterion and a minimum perimeter to area ratio criterion. The spatial arrangement of bands within the repeating unit cell minimizes inter-band correlation between nearest neighbors. The camera system further includes as short-wave infrared detector optically coupled to the mosaic optical color filter array. Optionally, the mosaic optical color filter array includes at least five spectral bands. The plurality of repeating unit cells includes the at least five spectral bands.Type: ApplicationFiled: September 11, 2015Publication date: March 17, 2016Inventors: Michael K. Yetzbacher, Michael Wilson
-
Publication number: 20150253189Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.Type: ApplicationFiled: May 20, 2014Publication date: September 10, 2015Inventors: Michael K. Yetzbacher, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
-
Patent number: 9035408Abstract: A ramped etalon cavity structure and a method of fabricating same. A bi-layer stack is deposited on a substrate. The bi-layer stack includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch stop layer and a bulk layer. A three dimensional photoresist structure is formed by using gray-tone lithography. The three dimensional photoresist is plasma etched into the bi-layer stack, thereby generating an etched bi-layer stack. The etched bi-layer stack is chemically etched with a first chemical etchant to generate a multiple-step structure on the substrate, wherein the first chemical etchant stops at the etch stop layer.Type: GrantFiled: May 5, 2014Date of Patent: May 19, 2015Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Andrew J. Boudreau, Michael K. Yetzbacher, Marc Christophersen, Bernard F. Phlips
-
Publication number: 20140327099Abstract: A ramped etalon cavity structure and a method of fabricating same. A bi-layer stack is deposited on a substrate. The bi-layer stack includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch stop layer and a bulk layer. A three dimensional photoresist structure is formed by using gray-tone lithography. The three dimensional photoresist is plasma etched into the bi-layer stack, thereby generating an etched bi-layer stack. The etched bi-layer stack is chemically etched with a first chemical etchant to generate a multiple-step structure on the substrate, wherein the first chemical etchant stops at the etch stop layer.Type: ApplicationFiled: May 5, 2014Publication date: November 6, 2014Inventors: Andrew J. Boudreau, Michael K. Yetzbacher, Marc Christophersen, Bernard F. Phlips