Patents by Inventor Michael K. Yetzbacher

Michael K. Yetzbacher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10473692
    Abstract: A method of calibrating a topography metrology instrument using a calibration reference, which includes a substrate and a plurality of bi-layer stacks. Each bi-layer stack includes a plurality of bi-layer steps. At least one bi-layer step of the plurality of bi-layer steps includes two materials. The at least one bi-layer step of the plurality of bi-layer steps includes an etch stop layer and a bulk layer. The calibration reference includes a calibration reference step profile includes a plurality of predetermined bi-layer stack heights. The calibration reference step profile and the predetermined bi-layer stack heights are measured using a topography metrology instrument. The topography metrology instrument is calibrated based on the measured calibration reference step profile and the measured bi-layer stack heights.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: November 12, 2019
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Marc Christophersen, Bernard F. Phlips, Andrew J. Boudreau, Michael K. Yetzbacher
  • Patent number: 10139531
    Abstract: A camera system includes a mosaic optical color filter array, which includes a plurality of repeating unit cells that enforce spectral consistency and spatial uniformity. Each repeating unit cell of the plurality of repeating unit cells satisfies a minimum focal-plane array perimeter criterion and a minimum perimeter to area ratio criterion. The spatial arrangement of bands within the repeating unit cell minimizes inter-band correlation between nearest neighbors. The camera system further includes as short-wave infrared detector optically coupled to the mosaic optical color filter array. Optionally, the mosaic optical color filter array includes at least five spectral bands. The plurality of repeating unit cells includes the at least five spectral bands.
    Type: Grant
    Filed: September 11, 2015
    Date of Patent: November 27, 2018
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Michael K. Yetzbacher, Michael Wilson
  • Patent number: 9997555
    Abstract: A device includes a surface profile optical element, including a substrate and a plurality of bi-layer stacks on the substrate. Each bi-layer stack of the plurality of bi-layer stacks includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch-stop layer and a bulk layer. The etch stop layer includes an etch stop layer index of refraction. The bulk layer includes a bulk layer index of refraction. A ratio of the etch stop layer index of retraction and the bulk layer index of refraction is between 0.75 and 1.25.
    Type: Grant
    Filed: May 17, 2017
    Date of Patent: June 12, 2018
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Marc Christophersen, Bernard F. Phlips, Michael K. Yetzbacher
  • Patent number: 9915563
    Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.
    Type: Grant
    Filed: February 18, 2016
    Date of Patent: March 13, 2018
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Michael K. Yetzbacher, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
  • Publication number: 20180040654
    Abstract: A device includes a surface profile optical element, including a substrate and a plurality of bi-layer stacks on the substrate. Each bi-layer stack of the plurality of bi-layer stacks includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch-stop layer and a bulk layer. The etch stop layer includes an etch stop layer index of refraction. The bulk layer includes a bulk layer index of refraction. A ratio of the etch stop layer index of retraction and the bulk layer index of refraction is between 0.75 and 1.25.
    Type: Application
    Filed: May 17, 2017
    Publication date: February 8, 2018
    Inventors: Marc Christophersen, Bernard F. Phlips, Michael K. Yetzbacher
  • Publication number: 20160161336
    Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.
    Type: Application
    Filed: February 18, 2016
    Publication date: June 9, 2016
    Applicant: The Government of the US, as represented by the Secretary of the Navy
    Inventors: MICHAEL K. YETZBACHER, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
  • Patent number: 9304040
    Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: April 5, 2016
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Michael K. Yetzbacher, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
  • Publication number: 20160091703
    Abstract: A method of calibrating a topography metrology instrument using a calibration reference, which includes a substrate and a plurality of bi-layer stacks. Each bi-layer stack includes a plurality of bi-layer steps. At least one bi-layer step of the plurality of bi-layer steps includes two materials. The at least one bi-layer step of the plurality of bi-layer steps includes an etch stop layer and a bulk layer. The calibration reference includes a calibration reference step profile includes a plurality of predetermined bi-layer stack heights. The calibration reference step profile and the predetermined bi-layer stack heights are measured using a topography metrology instrument. The topography metrology instrument is calibrated based on the measured calibration reference step profile and the measured bi-layer stack heights.
    Type: Application
    Filed: September 22, 2015
    Publication date: March 31, 2016
    Inventors: Marc Christophersen, Bernard F. Phlips, Andrew J. Boudreau, Michael K. Yetzbacher
  • Publication number: 20160077253
    Abstract: A camera system includes a mosaic optical color filter array, which includes a plurality of repeating unit cells that enforce spectral consistency and spatial uniformity. Each repeating unit cell of the plurality of repeating unit cells satisfies a minimum focal-plane array perimeter criterion and a minimum perimeter to area ratio criterion. The spatial arrangement of bands within the repeating unit cell minimizes inter-band correlation between nearest neighbors. The camera system further includes as short-wave infrared detector optically coupled to the mosaic optical color filter array. Optionally, the mosaic optical color filter array includes at least five spectral bands. The plurality of repeating unit cells includes the at least five spectral bands.
    Type: Application
    Filed: September 11, 2015
    Publication date: March 17, 2016
    Inventors: Michael K. Yetzbacher, Michael Wilson
  • Publication number: 20150253189
    Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.
    Type: Application
    Filed: May 20, 2014
    Publication date: September 10, 2015
    Inventors: Michael K. Yetzbacher, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
  • Patent number: 9035408
    Abstract: A ramped etalon cavity structure and a method of fabricating same. A bi-layer stack is deposited on a substrate. The bi-layer stack includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch stop layer and a bulk layer. A three dimensional photoresist structure is formed by using gray-tone lithography. The three dimensional photoresist is plasma etched into the bi-layer stack, thereby generating an etched bi-layer stack. The etched bi-layer stack is chemically etched with a first chemical etchant to generate a multiple-step structure on the substrate, wherein the first chemical etchant stops at the etch stop layer.
    Type: Grant
    Filed: May 5, 2014
    Date of Patent: May 19, 2015
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Andrew J. Boudreau, Michael K. Yetzbacher, Marc Christophersen, Bernard F. Phlips
  • Publication number: 20140327099
    Abstract: A ramped etalon cavity structure and a method of fabricating same. A bi-layer stack is deposited on a substrate. The bi-layer stack includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch stop layer and a bulk layer. A three dimensional photoresist structure is formed by using gray-tone lithography. The three dimensional photoresist is plasma etched into the bi-layer stack, thereby generating an etched bi-layer stack. The etched bi-layer stack is chemically etched with a first chemical etchant to generate a multiple-step structure on the substrate, wherein the first chemical etchant stops at the etch stop layer.
    Type: Application
    Filed: May 5, 2014
    Publication date: November 6, 2014
    Inventors: Andrew J. Boudreau, Michael K. Yetzbacher, Marc Christophersen, Bernard F. Phlips