Abstract: A recirculation system of a substrate support on which a semiconductor substrate is subjected to a multistep process in a vacuum chamber, the system comprising a substrate support having at least one liquid flow passage in a base plate thereof, an inlet and an outlet in fluid communication with the flow passage, a supply line in fluid communication with the inlet, and a return line in fluid communication with the outlet; a first recirculator providing liquid at temperature T1 in fluid communication with the supply line and the return line; a second recirculator providing liquid at temperature T2 in fluid communication with the supply line and the return line, temperature T2 being at least 10° C. above temperature T1; a pre-cooling unit providing liquid at temperature Tpc connected to the inlet and the outlet, temperature Tpc being at least 10° C. below T1; a pre-heating unit providing liquid at temperature Tph connected to the inlet and the outlet, temperature Tph being at least 10° C.

Abstract: A gas delivery system for a ceramic showerhead includes gas connection blocks and a gas ring, the gas connection blocks mounted on the gas ring such that gas outlets in the blocks deliver process gas to gas inlets in an outer periphery of the showerhead. The gas ring includes a bottom ring with channels therein and a welded cover plate enclosing the channels. The gas ring can include a first channel extending ½ the length of the gas ring, two second channels connected at midpoints thereof to downstream ends of the first channel, and four third channels connected at midpoints thereof to downstream ends of the second channels. the cover plate can include a first section enclosing the first channel, two second sections connected at midpoints thereof to ends of the first section, and third sections connected at midpoints thereof to ends of the second sections.

Abstract: A two piece ceramic showerhead includes upper and lower plates which deliver process gas to an inductively coupled plasma processing chamber. The upper plate overlies the lower plate and includes radially extending gas passages which extend inwardly from an outer periphery of the upper plate, axially extending gas passages in fluid communication with the radially extending gas passages and an annular recess forming a plenum between the upper and lower plates. The lower plate includes axially extending gas holes in fluid communication with the plenum. The upper plate can include eight radially extending gas passages evenly spaced around the periphery of the upper plate and the lower plate can include inner and outer rows of gas holes. The two piece ceramic showerhead forms a dielectric window of the chamber through which radiofrequency energy generated by an antenna is coupled into the chamber.

Abstract: This application relates to cyclic siloxane compounds comprising the structural formula where a?2 and b?2, R is an alkyl group containing 1 to 4 carbon atoms, R1 is independently hydrogen or methyl, compositions comprising any of the above cyclic siloxanes and an additional silicone, emulsion compositions comprising any of the above cyclic siloxanes or the above composition, and a process for preparing the above cyclic siloxane compounds comprising reacting a chloro end-blocked polydimethylsiloxane with a diol functional compound containing at least 3 carbon atoms.

Abstract: Embodiments of the invention facilitate high-dynamic-range (HDR) imaging by generating portions of spatial and/or temporal luminance patterns with different spectral power distributions substantially concurrent with, for example, the modulation of the light intensity associated with the portions of luminance patterns. The method can include predicting luminance patterns associated with multiple spectral power distributions. The method also can include distributing portions of the luminance patterns in one or more temporal fields. In some embodiments, distributing the portions of the luminance patterns can include interlacing those portions. Further, the method can include modulating light intensities of the luminance patterns to produce an age with other spectral power distributions. In some embodiments, the distribution of the luminance pattern portions can be substantially synchronous with modulating the light intensity of the luminance patterns.

Abstract: The present invention relates to systems and methods for the peer review, originality analysis, and contextual mark-up of formatted electronic documents. In particular, the present invention provides systems and methods that utilize layered peer review, originality analysis and contextual markup modules in one view. These systems and methods have many applications, including use for online editing and education.

Abstract: Embodiments relate generally to computer-based image processing, and more particularly, to systems, computer-readable media, methods, integrated circuits, and apparatuses to facilitate operation of a projection system with relatively high dynamic range output by, among other things, providing subsets of light patterns along an optical path during respective first and second temporal fields associated with respective first and second illuminants. The projection system can synthesize color for projectable images by combining or otherwise using the subsets of light patterns with an array of color elements to produce projectable images with color in at least the visible spectrum.

Abstract: A recirculation system of a substrate support on which a semiconductor substrate is subjected to a multistep process in a vacuum chamber, the system comprising a substrate support having at least one liquid flow passage in a base plate thereof, an inlet and an outlet in fluid communication with the flow passage, a supply line in fluid communication with the inlet, and a return line in fluid communication with the outlet; a first recirculator providing liquid at temperature T1 in fluid communication with the supply line and the return line; a second recirculator providing liquid at temperature T2 in fluid communication with the supply line and the return line, temperature T2 being at least 10° C. above temperature T1; a pre-cooling unit providing liquid at temperature Tpc connected to the inlet and the outlet, temperature Tpc being at least 10° C. below T1; a pre-heating unit providing liquid at temperature Tph connected to the inlet and the outlet, temperature Tph being at least 10° C.

Abstract: Sulfonate functional siloxane compositions, methods of their preparation, emulsion compositions containing them are disclosed. The compositions are useful in a variety of personal, household, healthcare formulations, as well as fabric and textile treatments.

Abstract: The present invention relates to systems and methods for the contextual mark-up of formatted electronic documents. These systems and methods have many applications, including use for online editing and education.

Abstract: Embodiments of the invention relate generally to generating images, and more particularly, to systems, apparatuses, integrated circuits, computer-readable media, and methods to facilitate the use of three dimensional color synthesis techniques to reproduce colors properly using, for example, two sub-pixel mosaics, at a boundary between two colors. A method can include receiving into a color element a first colored illuminant and a second colored illuminant. The method also can include determining that the color element is configured to generate a color that has one or more color characteristics for a portion of the reproduced image. Further, the method can include modifying at least one of the first colored illuminant and the second colored illuminant to adjust the one or more color characteristics into a range of values associated with a portion of an image that corresponds to the portion of the reproduced image.

Abstract: The present invention relates to systems and methods for the contextual mark-up of formatted electronic documents. These systems and methods have many applications, including use for online editing and education.

Abstract: Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.

Abstract: The present invention relates to systems and methods for the contextual mark-up of formatted electronic documents. These systems and methods have many applications, including use for online editing and education.

Abstract: A method for preparing a thermoplastic elastomer is disclosed, said method comprising (I) mixing (A) a rheologically stable polyamide resin having a melting point or glass transition temperature of 25° C. to 275° C., (B) a silicone base comprising (B′) 100 parts by weight of a diorganopolysiloxane gum having a plasticity of at least 30 and having an average of at least 2 alkenyl radicals in its molecule and (B″) 5 to 200 parts by weight of a reinforcing filler, the weight ratio of said silicone base to said polyamide resin is from 35:65 to 85:15, (C) 0.

Abstract: A method for preparing a thermoplastic elastomer is disclosed, said method comprising (I) mixing (A) a rheologically stable polyamide resin having a melting point or glass transition temperature of 25° C. to 275° C.

Abstract: A method for preparing a thermoplastic elastomer is disclosed, said method comprising: (I) mixing (A) a Theologically stable polyamide resin having a melting point or glass transition temperature of 25° C. to 275° C., (B) a silicone base comprising a diorganopolysiloxane gum having a plasticity of at least 30 and having an average of at least 2 alkenyl groups in its molecule and optionally (B″) 5 to 200 parts by weight of a reinforcing filler, the weight ratio of said silicone base to said polyamide resin is from 35:65 to 85:15, (C) a compatibilizer selected from glycidyl ester polymers or organofunctional grafted polyolefins, (D) an organohydrido silicon compound which contains an average of at least 2 silicon-bonded hydrogen groups in its molecule and (E) a hydrosilation catalyst, components (D) and (E) being present in an amount sufficient to cure said diorganopolysiloxane (B′); and (II) dynamically curing said diorganopolysiloxane (B′).

Abstract: A method of preparing a thermoplastic elastomer, and compositions thereof, are disclosed comprising: (I) mixing (A) a thermoplastic resin comprising more than 50 percent by volume of a polyester resin having a softening point of 23° C. to 300° C., (B) a silicone elastomer comprising a diorganopolysiloxane, where the weight ratio of said silicone elastomer to said thermoplastic resin is from 35:65 to 85:15, (C) a glycidyl ester compatibilizer, (D) an organohydrido silicon compound, and (E) a hydrosilation catalyst, components (D) and (E) being present in an amount sufficient to cure said diorganopolysiloxane; and (II) dynamically vulcanizing said diorganopolysiloxane, wherein at least one property of the thermoplastic elastomer selected from tensile strength or elongation is at least 25% greater than the respective property for a corresponding simple blend wherein said diorganopolysiloxane is not cured and said thermoplastic elastomer has an elongation of at least 30%.

Abstract: Thermoplastic elastomers are disclosed which are prepared by; (I) mixing, (A) a thermoplastic resin comprising more than 50 percent by volume of a polyamide or a polyester resin, (B) a silicone base comprising; (B′) 100 parts by weight of a diorganopolysiloxane gum having a plasticity of at least 30 and having an average of at least 2 alkenyl groups per molecule and (B″) 5 to 200 parts by weight of a reinforcing filler, wherein the weight ratio of said silicone base to said polyamide or polyester resin is from 35:65 to 85:15, (C) a compatibilizer, (D) a radical initiator, present in an amount sufficient to cure said diorganopolysiloxane gum, and optionally (E) a stabilizer, (II) dynamically vulcanizing said diorganopolysiloxanes gum, wherein at least one property of the thermoplastic elastomer selected from tensile strength or elongation is at least 25% greater than the respective property for a corresponding simple blend wherein said diorganopolysiloxane is not cured and said thermopla

Abstract: The present invention, therefore, relates to a method for preparing a thermoplastic elastomer, said method comprising: