Patents by Inventor Michael Kanouff

Michael Kanouff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10034362
    Abstract: The present disclosure is directed to plasma-based light sources. Systems and methods are described for protecting components of the light source from plasma generated debris which can include target material gas, atomic vapor, high energy ions, neutrals, micro-particles, and contaminants. Particular embodiments include arrangements for reducing the adverse effects of plasma generated ions and neutrals on light source components while simultaneously reducing in-band light attenuation due to target material gas and vapor.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: July 24, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Alexey Kuritsyn, Alexander Bykanov, Michael Kanouff, Oleg Khodykin
  • Publication number: 20160249442
    Abstract: The present disclosure is directed to plasma-based light sources. Systems and methods are described for protecting components of the light source from plasma generated debris which can include target material gas, atomic vapor, high energy ions, neutrals, micro-particles, and contaminants. Particular embodiments include arrangements for reducing the adverse effects of plasma generated ions and neutrals on light source components while simultaneously reducing in-band light attenuation due to target material gas and vapor.
    Type: Application
    Filed: August 28, 2015
    Publication date: August 25, 2016
    Inventors: Alexey Kuritsyn, Alexander Bykanov, Michael Kanouff, Oleg Khodykin
  • Publication number: 20070080062
    Abstract: Disclosed herein are methods and devices for applying two or more mobilization fields in a microchannel using a multifunctional structure and manipulating particles and fluids based on more than one characteristic. Specifically, a fluidic channel comprising at least one metal structure having a coat comprising a conductive material, an insulative material, a semi-conductive material, or a combination thereof, is disclosed. Also disclosed are methods for manipulating or assaying a particle in a sample which comprises subjecting the sample to a fluidic channel comprising at least one metal structure having a coat comprising a conductive material, an insulative material, a semi-conductive material, or a combination thereof and inducing at least one mobilization field such as a magnetic field, an electroosmotic field, an insulative dielectrophoresis (iDEP) field, which iDEP field may be an iDEP trapping field or an iDEP streaming field, or a combination thereof.
    Type: Application
    Filed: October 3, 2005
    Publication date: April 12, 2007
    Inventors: Cindy Harnett, Tyrone Hill, Michael Kanouff