Patents by Inventor MICHAEL KARAZIM

MICHAEL KARAZIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REMOTE PLASMA SOURCES
    Publication number: 20250316454
    Abstract: Embodiments are directed to a remote plasma system. In an example, a remote plasma system includes a first tube, a second tube, a first isolation component coupled between a first end of the first tube and a first end of the second tube, a second isolation component coupled between a second end of the first tube and a second end of the second tube, and a first capacitive element coupled to the first isolation component. In one example, the second tube and the first tube together can have a circular or oval shape. In one example, a first magnetic core is surrounding a portion of the first tube proximate the first isolation component, a second magnetic core is surrounding a portion of the first tube proximate the second isolation component, a third magnetic core is surrounding a portion of the second tube proximate the first isolation component, and a fourth magnetic core is surrounding a portion of the second tube proximate the second isolation component.
    Type: Application
    Filed: March 10, 2025
    Publication date: October 9, 2025
    Inventors: JIA PELPA, PETER FORTH, MEHDI BALOOCH, BRIAN BURROWS, ANDY CONSTANT, MICHAEL KARAZIM, BRIAN DEEMER, GREG LIM, AMIN SAEEDFAR, ROZA ALON
  • Substrate carrier having hard mask
    Patent number: 11047039
    Abstract: Substrate carrier apparatus having a hard mask are disclosed herein. In some embodiments, a substrate carrier apparatus includes a carrier body having a support surface to support a substrate; and a mask assembly disposed above the support surface. The mask assembly includes an annular frame disposed atop the support surface; and a hard mask coupled to and disposed within the annular frame above the support surface, wherein the hard mask includes one or more openings arranged in a predetermined pattern and disposed through the hard mask, and wherein the hard mask includes a plurality of spacer elements extending from a bottom surface of the hard mask.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: June 29, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Alexander Lerner, Kim Vellore, Ami Sade, Steven Sansoni, Andrew Constant, Kevin Moraes, Roey Shaviv, Niranjan Kumar, Jeffrey Brodine, Michael Karazim
  • SUBSTRATE CARRIER HAVING HARD MASK
    Publication number: 20190211442
    Abstract: Substrate carrier apparatus having a hard mask are disclosed herein. In some embodiments, a substrate carrier apparatus includes a carrier body having a support surface to support a substrate; and a mask assembly disposed above the support surface. The mask assembly includes an annular frame disposed atop the support surface; and a hard mask coupled to and disposed within the annular frame above the support surface, wherein the hard mask includes one or more openings arranged in a predetermined pattern and disposed through the hard mask, and wherein the hard mask includes a plurality of spacer elements extending from a bottom surface of the hard mask.
    Type: Application
    Filed: December 26, 2018
    Publication date: July 11, 2019
    Inventors: ALEXANDER LERNER, KIM VELLORE, AMI SADE, STEVEN SANSONI, ANDREW CONSTANT, KEVIN MORAES, ROEY SHAVIV, NIRANJAN KUMAR, JEFFREY BRODINE, MICHAEL KARAZIM