Patents by Inventor Michael KLOTS

Michael KLOTS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scatterometry method and system
    Patent number: 10302414
    Abstract: A method and system are presented for use in model-based optical measurements in patterned structures. The method comprises: selecting an optimal optical model for interpretation of optical measured data indicative of optical response of the structure under measurements. The selection of the optimal optical model comprises: creating a complete optical model with floating parameters defining multiple configurations of said complete model including one or more model configurations describing an optical response of the structure under measurements, utilizing the complete model for predicting a reference optical response from the structure and generating corresponding virtual reference data, and using the virtual reference data for selecting the optimal optical model for interpretation of the optical measured data.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: May 28, 2019
    Assignees: NOVA MEASURING INSTRUMENTS LTD., GLOBALFOUNDRIES INC.
    Inventors: Gilad Wainreb, Etai Littwin, Alok Vaid, Michael Klots, Cornel Bozdog, Matthew Sendelbach
  • SCATTEROMETRY METHOD AND SYSTEM
    Publication number: 20160076876
    Abstract: A method and system are presented for use in model-based optical measurements in patterned structures. The method comprises: selecting an optimal optical model for interpretation of optical measured data indicative of optical response of the structure under measurements. The selection of the optimal optical model comprises: creating a complete optical model with floating parameters defining multiple configurations of said complete model including one or more model configurations describing an optical response of the structure under measurements, utilizing the complete model for predicting a reference optical response from the structure and generating corresponding virtual reference data, and using the virtual reference data for selecting the optimal optical model for interpretation of the optical measured data.
    Type: Application
    Filed: September 14, 2015
    Publication date: March 17, 2016
    Inventors: Gilad WAINREB, Etai LITTWIN, Alok VAID, Michael KLOTS, Cornel BOZDOG, Matthew SENDELBACH