Abstract: A cell for conducting electrochemiluminescence measurements is disclosed. The cell in one embodiment provides a measurement cell housing having a cavity, a fluid inlet channel for inducing fluid into the cavity and a fluid outlet channel for discharging fluid from the cavity at axial ends. The cell also provides at least one working electrode and a counter electrode on or in the cavity, and an optical viewing element for observing electrochemiluminescence effects in the cavity, wherein the fluid inlet channel has an at least approximately continuous curved course in a transition area to the cavity so that the fluid inlet channel at its end which is joined to the cavity is shaped in such a manner as to constitute a continuous course of the transition between the fluid inlet channel and the cavity to generate a largely steady flow profile when inducing fluid into the measurement cell cavity.

Abstract: An improved apparatus for temporary wafer bonding includes a temporary bonder cluster and a debonder cluster. The temporary bonder cluster includes temporary bonder modules that perform electronic wafer bonding processes including adhesive layer bonding, combination of an adhesive layer with a release layer bonding and a combination of a UV-light curable adhesive layer with a laser absorbing release layer bonding. The debonder cluster includes a thermal slide debonder, a mechanical debonder and a radiation debonder.

Abstract: A cell for conducting electrochemiluminescence measurements is disclosed. The cell in one embodiment provides a measurement cell housing having a cavity, a fluid inlet channel for inducing fluid into the cavity and a fluid outlet channel for discharging fluid from the cavity at axial ends. The cell also provides at least one working electrode and a counter electrode on or in the cavity, and an optical viewing element for observing electrochemiluminescence effects in the cavity, wherein the fluid inlet channel has an at least approximately continuous curved course in a transition area to the cavity so that the fluid inlet channel at its end which is joined to the cavity is shaped in such a manner as to constitute a continuous course of the transition between the fluid inlet channel and the cavity to generate a largely steady flow profile when inducing fluid into the measurement cell cavity.

Abstract: The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber module having an integrated, sturdy, chemical and temperature resistant wafer lift pins and door actuation apparatus. One of the benefits that is derived from this apparatus is the ability to quickly and easily attach various processing modules at any docking position of the semiconductor wafer/substrate material handling unit (hereinafter MHU). The MHU of this apparatus has the additional benefit of a cassette station that automatically aligns and detects a plurality of different size and shape semiconductor wafer/substrate cassettes. The semiconductor wafer/substrate cassettes may also be functionally attached to a module that is docked to the MHU for use.