Abstract: Disclosed are both methods and a circuit to achieve powers of many kilowatts in radio frequency amplification using a switch mode amplifier in a new class of operation. In operation the invention utilizes internal switch characteristics. Methods create a substantial voltage step at the end of a response time period which allows greater output power without increasing the maximum switch voltage, reduces the maximum switch voltage for the same power, and which permits reduction of the stress on the switch element. Utilization of internal varactor capacitance avoids undesirable circulating currents and avoids the effects of lead inductance. The design allows use of less expensive components and high voltage switches not manufactured for radio frequency applications by preferring a substantial internal capacitance to establish maximum power. Other components of the network circuitry are also coordinated with the internal varactor capacitance.

Abstract: Circuitry and techniques designed to allow stable and continuous delivery of alternating power to a plasma with switch-mode power supply (16) include a variety of embodiments. Parallel, series, and other circuit elements connected across switching element (7) are tuned so that energy at other than the fundamental frequency is absorbed and dissipated. This energy may be only at the second harmonic or it may be across broad frequency ranges through selecting high impedance at the fundamental frequency and relatively low impedance at other frequencies. In overcoming instabilities, oscillations, and even changing class of operation of the switch-mode power supply, the stabilizing element absorbs the energy to avoid allowing it to affect switch (7) of power supply (16).

Abstract: Circuitry and techniques designed to allow stable and continuous delivery of alternating power to a processing plasma with switch-mode power supply (16) include a variety of embodiments. Parallel, series, and other circuit elements connected across switching element (7) are tuned so that energy at other than the fundamental frequency is absorbed and dissipated. This energy may be only at the second harmonic or it may be across broad frequency ranges through selecting high impedance at the fundamental frequency and relatively low impedance at other frequencies. In overcoming instabilities, oscillations, and even changing class of operation of the switch-mode power supply, the stabilizing element absorbs the energy to avoid allowing it to affect switch (7) of power supply (16).

Abstract: Disclosed are both methods and a circuit to achieve powers of many kilowatts in radio frequency amplification using a switch mode amplifier in a new class of operation. In operation the invention utilizes internal switch characteristics. Methods create a substantial voltage step at the end of a response time period which allows greater output power without increasing the maximum switch voltage, reduces the maximum switch voltage for the same power, and which permits reduction of the stress on the switch element. Utilization of internal varactor capacitance avoids undesirable circulating currents and avoids the effects of lead inductance. The design allows use of less expensive components and high voltage switches not manufactured for radio frequency applications by preferring a substantial internal capacitance to establish maximum power. Other components of the network circuitry are also coordinated with the internal varactor capacitance.