Patents by Inventor Michael Leck

Michael Leck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Clamping and contacting device for thin silicon rods
    Patent number: 9238584
    Abstract: A clamping and contacting device for mounting and electrically contacting thin silicon rods in silicon deposition reactors is disclosed, the clamping and contacting device having a rod holder for receiving one end of a thin silicon rod. The rod holder comprises at least three contact elements disposed around a receiving space for the thin silicon rod. Each of the contact elements forms a contact surface facing towards a receiving space for electrically and mechanically contacts the thin silicon rod, wherein the contact surfaces of adjacent contact elements are spaced apart.
    Type: Grant
    Filed: March 29, 2010
    Date of Patent: January 19, 2016
    Assignee: SITEC GmbH
    Inventors: Frank Stubhan, Michael Leck
  • NOZZLE ARRANGEMENT AND CVD-REACTOR
    Publication number: 20130019802
    Abstract: A nozzle arrangement has a nozzle body having an inlet, an outlet and a flow space arranged therebetween, and at least one control unit. The control unit has a control part and a setting part. The control part is movable within the flow space and defines a flow cross section within the flow space, which is sufficiently small to cause a loss of pressure at the control part upon a flow of gas through the nozzle body, the loss of pressure biasing the control part towards the outlet. The setting part is movable with the control part and has at least one section, which upon movement thereof varies the flow cross section of the outlet. At least one biasing element is provided, which biases the control part in a direction away from the outlet. Furthermore, a CVD-reactor incorporating such a nozzle arrangement in a bottom wall thereof is described.
    Type: Application
    Filed: December 22, 2011
    Publication date: January 24, 2013
    Inventor: Michael Leck
  • CLAMPING AND CONTACTING DEVICE FOR THIN SILICON RODS
    Publication number: 20120135635
    Abstract: A clamping and contacting device for mounting and electrically contacting thin silicon rods in silicon deposition reactors is disclosed, the clamping and contacting device having a rod holder for receiving one end of a thin silicon rod. The rod holder comprises at least three contact elements disposed around a receiving space for the thin silicon rod. Each of the contact elements forms a contact surface facing towards a receiving space for electrically and mechanically contacts the thin silicon rod, wherein the contact surfaces of adjacent contact elements are spaced apart.
    Type: Application
    Filed: March 29, 2010
    Publication date: May 31, 2012
    Inventors: Frank Stubhan, Michael Leck
  • METHOD AND DEVICE FOR THE TREATMENT OF SURFACES
    Publication number: 20100275950
    Abstract: The invention relates to a device and a method for the treatment of surfaces with a plasma produced under atmospheric pressure.
    Type: Application
    Filed: December 9, 2008
    Publication date: November 4, 2010
    Inventors: Helmut Mack, Tobias Austermann, Martin Ebner, Michael Leck, Wolfgang Viöl