Abstract: Exemplary embodiments of the invention relate to a wafer cassette, to a wafer cassette pod and to a minienvironment chamber loadport arrangement with a minienvironment chamber and a wafer cassette pod. In one exemplary embodiment of the invention, a wafer cassette is provided which has a plurality of wafer supports for supporting wafers, with the wafer supports being designed such that the pitch between wafers supported by means of the wafer supports is variable.

Abstract: The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.

Abstract: An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.

Abstract: An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.

Abstract: A vehicle for transporting semiconductor devices is used for servicing loadports of semiconductor processing tools with device carriers by use of a portal hoist. Thereby, the vehicle contains an empty inner space and an open front side, such that the loadport is enclosed by the vehicle, when it approaches and docks to the loadport. Time for loading is shortened, complexity of structure and procedure is reduced and cleanroom space is saved.

Abstract: A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.

Abstract: A container for wafer like objects includes a container body and a door closing the container body and which is provided with a device for locking and unlocking the door, including locking elements and holding elements in which the locking elements that lock the door engage. At least one locking element includes a first signal element which is operatively connected to a second signal element arranged at a position important for the engagement of the locking element in the holding element.

Abstract: A conveyor element (10) for conveying wafer receptacles between a conveyor (12) and a loading station (11) of a manufacturing system in the semiconductor industry has a lifting mechanism (13) to move the wafer receptacle from a first position of the conveyor (12) or the loading station (11) into a second position of the conveyor (12) or of the loading station (11) substantially in a vertical direction. Rollers (14) are provided to move the wafer receptacle from the second position of the conveyor (12) along a substantially horizontal direction to the second position of the loading station (11) or from the second position of the loading station (11) to the second position of the conveyor (12).

Abstract: An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.

Abstract: A vehicle for transporting semiconductor devices is used for servicing loadports of semiconductor processing tools with device carriers by use of a portal hoist. Thereby, the vehicle contains an empty inner space and an open front side, such that the loadport is enclosed by the vehicle, when it approaches and docks to the loadport. Time for loading is shortened, complexity of structure and procedure is reduced and cleanroom space is saved.

Abstract: An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.

Abstract: A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.

Abstract: A transportation system (100/200) has a wafer container (100), such as a FOUP, to rest on a support surface (200). The container has kinematic coupling grooves, and the support surface has kinematic coupling pins. Grooves and pins are at least partially electrically conductive and allow coupling an electric device (150) associated with the container to an electrical circuit (250) associated with the support surface. Device and circuit in combination allow to perform a variety of functions, such as monitoring the correct position of the container, and exchanging signals.