Patents by Inventor Michael Maldei
Michael Maldei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8606982Abstract: Embodiments of the invention are related to methods, systems, and articles of manufacture for transferring data between two devices using an interconnect bus. On each conductive line of the bus, a bit representing a first logic state is transferred if a current bit is the same as an immediately previously transmitted bit. If the current bit is different from the immediately previously transmitted bit, then a bit representing a second logic state is transferred.Type: GrantFiled: March 10, 2008Date of Patent: December 10, 2013Assignee: Qimonda AGInventors: Michael Maldei, Petra Stumm
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Publication number: 20090228624Abstract: Embodiments of the invention are related to methods, systems, and articles of manufacture for transferring data between two devices using an interconnect bus. On each conductive line of the bus, a bit representing a first logic state is transferred if a current bit is the same as an immediately previously transmitted bit. If the current bit is different from the immediately previously transmitted bit, then a bit representing a second logic state is transferred.Type: ApplicationFiled: March 10, 2008Publication date: September 10, 2009Inventors: Michael Maldei, Petra Stumm
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Patent number: 7163891Abstract: A dynamic random access memory (DRAM) structure having a distance less than 0.14 um between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneously.Type: GrantFiled: December 3, 2004Date of Patent: January 16, 2007Assignee: Infineon Technologies AGInventors: Michael Maldei, Brian Cousineau, Guenter Gerstmeier, Jon S. Berry, II, Steven M. Baker, Jinhwan Lee
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Patent number: 7049193Abstract: A process for fabricating a semiconductor structure, wherein the semiconductor structure includes a core region and a periphery region. The core region includes a plurality of transistors and the periphery region includes a plurality of transistors. The process includes depositing a middle-of-line liner using plasma enhanced chemical vapor deposition overlying the semiconductor structure. By using a plasma enhanced chemical vapor deposition the amount of MOL liner deposited in the core region and the periphery region can be controlled depending on the distances between transistors in the core region and periphery region.Type: GrantFiled: October 7, 2004Date of Patent: May 23, 2006Assignee: Infineon Technologies AGInventors: Michael Maldei, Jinhwan Lee, Guenter Gerstmeier, Brian Cousineau, Jon S. Berry, II, Steven M. Baker, Malati Hedge
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Patent number: 6960523Abstract: An etch rate of a nitride liner layer is improved relative to an etch rate of a nitride cap layer. The nitride liner layer is located at an exposed portion of a substrate adjacent to a stacked structure also located atop the substrate. The nitride cap layer is located atop the stacked structure. An oxide spacer is formed along sidewalls of the stacked structure. The nitride liner layer is patterned and etched to form at least one opening therein to the substrate while the nitride cap layer remains substantially intact.Type: GrantFiled: April 3, 2003Date of Patent: November 1, 2005Assignees: Infineon Technolgies AG, International Business Machines CorporationInventors: Michael Maldei, Prakash C. Dev, David Dobuzinsky, Johnathan Faltermeier, Thomas S. Rupp, Chienfan Yu, Rajesh Rengarajan, John Benedict, Munir-ud-Din Naeem
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Patent number: 6909152Abstract: A dynamic random access memory (DRAM) structure having a distance less than 0.14 ?m between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneously.Type: GrantFiled: November 14, 2002Date of Patent: June 21, 2005Assignee: Infineon Technologies, AGInventors: Michael Maldei, Brian Cousineau, Guenter Gerstmeier, Jon S. Berry, II, Steven M. Baker, Jinhwan Lee
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Publication number: 20050130352Abstract: A dynamic random access memory (DRAM) structure having a distance less than 0.14 um between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneously.Type: ApplicationFiled: December 3, 2004Publication date: June 16, 2005Inventors: Michael Maldei, Brian Cousineau, Guenter Gerstmeier, Jon Berry, Steven Baker, Jinhwan Lee
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Patent number: 6890815Abstract: A method of forming borderless contacts and a borderless contact structure for semiconductor devices. A preferred embodiment comprises using a second etch selectivity material disposed over a first etch selectivity material to preserve the first etch selectivity material during the etch processes for the various material layers of the semiconductor device while forming the borderless contacts.Type: GrantFiled: September 4, 2003Date of Patent: May 10, 2005Assignees: Infineon Technologies AG, International Business Machines CorporationInventors: Johnathan Faltermeier, Jeremy Stephens, David Dobuzinsky, Larry Clevenger, Munir D. Naeem, Chienfan Yu, Larry Nesbit, Rama Divakaruni, Michael Maldei
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Publication number: 20050077562Abstract: A method of forming bitlines for a memory cell array of an integrated circuit and conductive lines interconnecting transistors of an external region outside of the memory cell array is provided. The method includes patterning troughs in a dielectric region covering the memory cell array according to a first critical dimension mask. Bitline contacts to a substrate and bitlines are formed in the troughs. Thereafter, conductive lines are formed which consist essentially of at least one material selected from the group consisting of metals and conductive compounds of metals in horizontally oriented patterns patterned by a second critical dimension mask, wherein the conductive lines interconnect the bitlines to transistors of external circuitry outside of the memory cell array, the conductive lines being interconnected to the bitlines only at peripheral edges of the memory cell array.Type: ApplicationFiled: October 10, 2003Publication date: April 14, 2005Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORPInventors: Rama Divakaruni, Johnathan Faltermeier, Michael Maldei, Jay Strane
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Publication number: 20050062111Abstract: A process for fabricating a semiconductor structure, wherein the semiconductor structure includes a core region and a periphery region. The core region includes a plurality of transistors and the periphery region includes a plurality of transistors. The process includes depositing a middle-of-line liner using plasma enhanced chemical vapor deposition overlying the semiconductor structure. By using a plasma enhanced chemical vapor deposition the amount of MOL liner deposited in the core region and the periphery region can be controlled depending on the distances between transistors in the core region and periphery region.Type: ApplicationFiled: October 7, 2004Publication date: March 24, 2005Inventors: Michael Maldei, Jinhwan Lee, Guenter Gerstmeier, Brian Cousineau, Jon Berry, Steven Baker, Malati Hedge
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Patent number: 6870211Abstract: A method of forming bitlines for a memory cell array of an integrated circuit and conductive lines interconnecting transistors of an external region outside of the memory cell array is provided. The method includes patterning troughs in a dielectric region covering the memory cell array according to a first critical dimension mask. Bitline contacts to a substrate and bitlines are formed in the troughs. Thereafter, conductive lines are formed which consist essentially of at least one material selected from the group consisting of metals and conductive compounds of metals in horizontally oriented patterns patterned by a second critical dimension mask, wherein the conductive lines interconnect the bitlines to transistors of external circuitry outside of the memory cell array, the conductive lines being interconnected to the bitlines only at peripheral edges of the memory cell array.Type: GrantFiled: October 10, 2003Date of Patent: March 22, 2005Assignee: International Business Machines CorporationInventors: Rama Divakaruni, Johnathan E. Faltermeier, Michael Maldei, Jay Strane
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Publication number: 20050051839Abstract: A method of forming borderless contacts and a borderless contact structure for semiconductor devices. A preferred embodiment comprises using a second etch selectivity material disposed over a first etch selectivity material to preserve the first etch selectivity material during the etch processes for the various material layers of the semiconductor device while forming the borderless contacts.Type: ApplicationFiled: September 4, 2003Publication date: March 10, 2005Inventors: Johnathan Faltermeier, Jeremy Stephens, David Dobuzinsky, Larry Clevenger, Munir Naeem, Chienfan Yu, Larry Nesbit, Rama Divakaruni, Michael Maldei
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Patent number: 6847092Abstract: A capacitor for a semiconductor device and a method of manufacturing a capacitor for a semiconductor device is disclosed that uses radial current flow. The capacitor includes a semiconductor substrate that includes a plurality of insulation islands. An insulation layer is formed over the semiconductor substrate. Gate electrodes are formed on top of the insulation layer. An array of CD contact pads including a plurality of CD contacts are connected to the semiconductor substrate in a first predetermined number of locations. An array of CG contact pads including at least one CG contact connected to the gate electrodes such that each CG contact is connected to a respective gate electrode above a respective insulation island in a second predetermined number of locations.Type: GrantFiled: March 6, 2003Date of Patent: January 25, 2005Assignee: Infineon Technologies AGInventors: Michael Maldei, Malati Hegde, Guenter Gerstmeier, Jinwhan Lee, Steven M. Baker, Jon S. Berry, II, Brian Cousineau, Wenchao Zheng
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Publication number: 20050014332Abstract: A semiconductor device is fabricated to have improved bitline contact formation. Polysilicon is deposited between gate contacts that connect to transistors of DRAM memory cells. The polysilicon covers the gate contacts and continues to cover the gate contacts during subsequent processing steps. A bitline of, e.g., tungsten, is deposited so that it contacts at least a portion of the polysilicon, thereby providing electrical contact with the DRAM transistors.Type: ApplicationFiled: July 15, 2003Publication date: January 20, 2005Applicants: Infineon Technologies North America Corp., International Business Machines CorporationInventors: Michael Maldei, Johnathan Faltermeier, David Dobuzinsky, Prakash Dev, Thomas Rupp
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Patent number: 6822301Abstract: A process for fabricating a semiconductor structure, wherein the semiconductor structure includes a core region and a periphery region. The core region includes a plurality of transistors and the periphery region includes a plurality of transistors. The process includes depositing a middle-of-line liner using plasma enhanced chemical vapor deposition overlying the semiconductor structure. By using a plasma enhanced chemical vapor deposition the amount of MOL liner deposited in the core region and the periphery region can be controlled depending on the distances between transistors in the core region and periphery region.Type: GrantFiled: July 31, 2002Date of Patent: November 23, 2004Assignee: Infineon Technologies AGInventors: Michael Maldei, Jinhwan Lee, Guenter Gerstmeier, Brian Cousineau, Jon S. Berry, II, Steven M. Baker, Malati Hedge
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Publication number: 20040195607Abstract: An etch rate of a nitride liner layer is improved relative to an etch rate of a nitride cap layer. The nitride liner layer is located at an exposed portion of a substrate adjacent to a stacked structure also located atop the substrate. The nitride cap layer is located atop the stacked structure. An oxide spacer is formed along sidewalls of the stacked structure. The nitride liner layer is patterned and etched to form at least one opening therein to the substrate while the nitride cap layer remains substantially intact.Type: ApplicationFiled: April 3, 2003Publication date: October 7, 2004Applicants: Infineon Technologies North America Corp., International Business Machines CorporationInventors: Michael Maldei, Prakash C. Dev, David Dobuzinsky, Johnathan Faltermeier, Thomas S. Rupp, Chienfan Yu, Rajesh Rengarajan, John Benedict, Munir-ud-Din Naeem
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Publication number: 20040173868Abstract: A capacitor for a semiconductor device and a method of manufacturing a capacitor for a semiconductor device is disclosed that uses radial current flow. The capacitor includes a semiconductor substrate that includes a plurality of insulation islands. An insulation layer is formed over the semiconductor substrate. Gate electrodes are formed on top of the insulation layer. An array of CD contact pads including a plurality of CD contacts are connected to the semiconductor substrate in a first predetermined number of locations. An array of CG contact pads including at least one CG contact connected to the gate electrodes such that each CG contact is connected to a respective gate electrode above a respective insulation island in a second predetermined number of locations.Type: ApplicationFiled: March 6, 2003Publication date: September 9, 2004Inventors: Michael Maldei, Malati Hegde, Guenter Gerstmeier, Jinwhan Lee, Steven M. Baker, Jon S. Berry, Brian Cousineau, Wenchao Zheng
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Patent number: 6740568Abstract: In a method of forming a contact, a liner reactive ion etch is affected on a substrate to remove silicon nitride and silicon oxide. An oxygen plasma ex-situ clean, a Huang AB clean, and a dilute hydrofluric acid (DHF) clean are affected. Amorphous silicon is deposited and an anneal is performed to regrow and recrystallize amorphous silicon.Type: GrantFiled: July 29, 2002Date of Patent: May 25, 2004Assignees: Infineon Technologies AG, International Business Machines CorporationInventors: Yun Yu Wang, Johnathan Faltermeier, Colleen M. Snavely, Michael Maldei, Michael M. Iwatake, David M. Dobuzinsky, Ravikumar Ramachandran, Viraj Y. Sardesai, Philip L. Flaitz, Lisa Y. Ninomiya
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Publication number: 20040094810Abstract: A dynamic random access memory (DRAM) structure having a distance less than 0.14 um between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneously.Type: ApplicationFiled: November 14, 2002Publication date: May 20, 2004Applicant: Infineon Technologies North America Corp.Inventors: Michael Maldei, Brian Cousineau, Guenter Gerstmeier, Jon S. Berry, Steven M. Baker, Jinhwan Lee
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Publication number: 20040021154Abstract: A process for fabricating a semiconductor structure, wherein the semiconductor structure includes a core region and a periphery region. The core region includes a plurality of transistors and the periphery region includes a plurality of transistors. The process includes depositing a middle-of-line liner using plasma enhanced chemical vapor deposition overlying the semiconductor structure. By using a plasma enhanced chemical vapor deposition the amount of MOL liner deposited in the core region and the periphery region can be controlled depending on the distances between transistors in the core region and periphery region.Type: ApplicationFiled: July 31, 2002Publication date: February 5, 2004Applicant: Infineon Technologies North America Corp.Inventors: Michael Maldei, Jinhwan Lee, Guenter Gerstmeier, Brian Cousineau, Jon S. Berry, Steven M. Baker, Malati Hedge