Abstract: The disclosure in one aspect provides an illuminator that includes a plurality of segmented diodes to generate a plurality of light beams. In another aspect, the illuminator may independently control current to some or all of the diodes.

Abstract: The disclosure in one aspect provides an illuminator that includes a plurality of segmented diodes to generate a plurality of light beams. In another aspect, the illuminator may independently control current to some or all of the diodes.

Abstract: A method of fabricating a micromechanical device. Several of the micromechanical devices are fabricated 20 on a common wafer. After the devices are fabricated, the sacrificial layers are removed 22 leaving open spaces where the sacrificial layers once were. These open spaces allow for movement of the components of the micromechanical device. The devices optionally are passivated 24, which may include the application of a lubricant. After the devices have been passivated, they are tested 26 in wafer form. After testing 26, any surface treatments that are not compatible with the remainder of the processing steps are removed 28. The substrate wafer containing the completed devices receives a conformal overcoat 30. The overcoat layer is thick enough to project the micromechanical structures, but thin and light enough to prevent deforming the underlying micromechanical structures.